Fabrication of micro pneumatic valves with double-layer elastic poly(dimethylsiloxane) membranes in rigid poly(methyl methacrylate) microfluidic chips

Journal of Micromechanics and Microengineering

Volumn 22, Issue 8, 2012, Pages

  Huang, Shanshi ^a   He, Qiaohong ^a   Hu, Xianqiao ^a   Chen, Hengwu ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

3-AMINOPROPYLTRIETHOXYSILANE; ADHESIVE FORCE; DOUBLE LAYERS; DROPLET GENERATION; FOUR-LAYER STRUCTURES; GLOW DISCHARGE PLASMAS; HOT-EMBOSSING; IN-CHIP; MICRO-FLOW; MICROFLUIDIC CHIP; PDMS MEMBRANE; PNEUMATIC VALVE; POLYDIMETHYLSILOXANE MEMBRANE; POTENTIAL APPLICATIONS; ROUTINE ANALYSIS;

ESTERS; GLOW DISCHARGES; MICROCHANNELS; SUBSTRATES;

PNEUMATIC EQUIPMENT;

EID: 84864447226     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/8/085008     Document Type: Article

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