High-sensitivity humidity sensors with ZnO nanorods based two-port surface acoustic wave delay line

Sensors and Actuators, B: Chemical

Volumn 171-172, Issue , 2012, Pages 1283-1287

  Hong, Hoang Si ^a   Phan, Duy Thach ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

AlN thin film; Nanorod ZnO; SAW humidity sensor

Indexed keywords

ALN; ALN THIN FILMS; HIGH SURFACE-TO-VOLUME RATIO; HIGH-SENSITIVITY; NANOCRYSTALLINE ZNO; RESONANCE FREQUENCIES; RESONANCE FREQUENCY SHIFT; SAW PROPERTIES; SAW STRUCTURE; SENSING LAYERS; SURFACE ACOUSTIC WAVES; ZINC OXIDE (ZNO); ZNO; ZNO NANOROD;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; HUMIDITY SENSORS; NANORODS; NATURAL FREQUENCIES;

ZINC OXIDE;

EID: 84864279883     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.06.026     Document Type: Article

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