Efficient FDC based on hierarchical tool condition monitoring scheme

ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

Volumn , Issue , 2012, Pages 359-364

  Blue, Jakey ^a   Roussy, Agnès ^a   Thieullen, Alexis ^b   Pinaton, Jacques ^b  

^a ECOLE DES MINES DE SAINT ETIENNE   (France)

^b AIX MARSEILLE UNIV   (France)

Author keywords

Fault Detection and Classification (FDC); generalized variance; moving variance and covariance; principal component analysis; tool condition hierarchy

Indexed keywords

EXTERNAL SENSORS; FAULT DETECTION AND CLASSIFICATION; FAULT IDENTIFICATIONS; GENERALIZED VARIANCE; HIERARCHICAL TOOLS; MOVING VARIANCE AND COVARIANCE; ROOT CAUSE ANALYSIS; SEMICONDUCTOR MANUFACTURING; SENSOR LEVEL; TECHNOLOGY NODES; TOOL CONDITION;

PRINCIPAL COMPONENT ANALYSIS; SEMICONDUCTOR DEVICE MANUFACTURE;

SENSORS;

EID: 84863902218     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.2012.6212927     Document Type: Conference Paper

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