Proportional hazard model with ℓ1 penalization applied to predictive maintenance in semiconductor manufacturing

IEEE International Conference on Automation Science and Engineering

Volumn , Issue , 2011, Pages 250-255

  Pampuri, Simone ^a,b   Schirru, Andrea ^a,c   De Luca, Cristina ^b   De Nicolao, Giuseppe ^a  

^a UNIVERSITY OF PAVIA   (Italy)

^b INFINEON TECHNOLOGIES AUSTRIA AG   (Austria)

^c SCUOLA UNIVERSITARIA SUPERIORE IUSS PAVIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DATA SETS; DATA-DRIVEN; DOWNTIME REDUCTION; EXPERT KNOWLEDGE; MODELING TECHNIQUE; PREDICTION ACCURACY; PREDICTIVE MAINTENANCE; PROCESS DATA; PROCESS VARIABLES; PRODUCTION QUALITY; PRODUCTIVE PROCESS; PROPORTIONAL HAZARD MODELS; SEMICONDUCTOR MANUFACTURING; SPARE PARTS; SURVIVAL MODEL;

EQUIPMENT; MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE;

MAINTAINABILITY;

EID: 82455219058     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CASE.2011.6042436     Document Type: Conference Paper

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