MultiVariate fault detection (MVFD) EP/FDC implementation

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 377-380

  Biton, Tal ^a,b,c   Ratner, Hagay ^a,b  

^a Intel Intel Inc   (Israel)

^b INTEL CORPORATION   (Israel)

^c FaB 18 Yield Department   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; PRINCIPAL COMPONENT ANALYSIS; PROCESS CONTROL; STATISTICAL METHODS;

MVFD; PROCESS INPUT VARIABLES;

ELECTRIC FAULT LOCATION;

EID: 28744437823     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/issm.2005.1513383     Document Type: Conference Paper

References (4)

1. John Mao (Analysis & Control Technology, CTM), Fault Diagnosis with Multivariate Control Charts, 2003 & 2004 Intel APC Summits.
2. Kevin Anderson (Staff Technologist & Statistician F11 Yield Department) & Theresa Utlaut (Statistician Portland Technology Development), Beware of the Hype: A Fair and Critical Review of Multivariate Statistical Process Control, Intel Corporation 22 October, 2003
3. IMP Version 5 Statistics and Graphics Guide; SAS Institute.
4. Hagay Ratner (Implant process engineer F18) & Eli Ben-Hamu (VMS automation engineer F18), Breakthrough approach in developing fast and low cost Excursion Prevention system, Intel APC summit 2004.