Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas

Measurement Science and Technology

Volumn 23, Issue 8, 2012, Pages

  Oh, Se Jin ^a   Choi, Ik Jin ^a   Kim, Jin Yong ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

diagnostics; double probe; electrostatic probe; measurement; plasma

Indexed keywords

INDUCTIVELY COUPLED PLASMA; IONS; MEASUREMENTS; PLASMA DIAGNOSTICS; PLASMAS; PROBES;

DIAGNOSTIC SYSTEMS; DOUBLE PROBE; ELECTROSTATIC PROBE; FLOATING TYPES; HARMONIC CURRENT DETECTION; PROCESSING PLASMA; SINGLE PROBE; THIRD HARMONIC;

ELECTRON TEMPERATURE;

EID: 84863835426     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/23/8/085001     Document Type: Article

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