Measurement of electron temperature and ion density using the self-bias effect in plasmas

Physics of Plasmas

Volumn 17, Issue 6, 2010, Pages

  Hwang, Kwang Tae ^a   Oh, Se Jin ^a   Choi, Ik Jin ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AC BIAS; BLOCKING CAPACITOR; FIRST HARMONIC; HARMONIC COMPONENTS; ION DENSITY; ION FLUXES; LOCAL IONIZATION; PROBE CURRENTS; SELF-BIAS; SELF-BIAS EFFECT;

AC GENERATOR MOTORS; BIAS VOLTAGE; FAST FOURIER TRANSFORMS; IONS; LANGMUIR PROBES; PLASMA DIAGNOSTICS; PROBES; SIGNAL GENERATORS; WAVELET TRANSFORMS;

ELECTRON TEMPERATURE;

EID: 77954128076     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3430632     Document Type: Article

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