Aluminum nitride grating couplers

Applied Optics

Volumn 51, Issue 17, 2012, Pages 3763-3767

  Ghosh, Siddhartha ^a   Doerr, Christopher R ^b,c   Piazza, Gianluca ^a,d  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b Acacia Communications Inc   (United States)

^c LUCENT TECHNOLOGIES   (United States)

^d CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; LITHOGRAPHY; NITRIDES; PHOTONICS; PIEZOELECTRICITY; SILICON OXIDES; SILICON WAFERS; WAVEGUIDES;

COUPLING EFFICIENCY; GRATING COUPLERS; INTEGRATED PHOTONICS; MICRO-MACHINED; MINIMUM FEATURE SIZES; OPTIC PROPERTIES; OPTO-MECHANICS; WIRE WAVE GUIDES;

ALUMINUM;

EID: 84863761312     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.003763     Document Type: Article

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