Micro-/nanocombined gas sensors with functionalized mesoporous thin film self-assembled in batches onto resonant cantilevers

IEEE Transactions on Industrial Electronics

Volumn 59, Issue 12, 2012, Pages 4881-4887

  Yu, Haitao ^a   Xu, Pengcheng ^a   Xia, Xiaoyuan ^a   Lee, Dong Weon ^b   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b Chonnam National University   (South Korea)

Author keywords

Chemical sensor; in wall modification; mesoporous thin film (MTF); microelectromechanical systems (MEMS); resonant cantilever

Indexed keywords

CONSTRUCTION TECHNIQUE; FREE END; FUNCTIONALIZED; GRAVIMETRIC SENSORS; IN-WALL MODIFICATION; INNER SURFACES; LOW COSTS; MESOPOROUS THIN FILMS; MICRO-CANTILEVERS; NANOSENSING; QUICK RESPONSE; RESONANT CANTILEVER; SELF-ASSEMBLED; SENSING MOLECULES; SENSING REGION; SENSITIVE DETECTION; TOPDOWN;

CARBON DIOXIDE; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; MEMS; MESOPOROUS MATERIALS; NANOCANTILEVERS;

CHEMICAL SENSORS;

EID: 84863760370     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2011.2173094     Document Type: Article

References (32)

1. H. Meixner and U. Lampe, "Metal oxide sensors," Sens. Actuators B, Chem., vol. 33, no. 1-3, pp. 198-202, Jul. 1996.
2. J. J. Hickman, D. Ofer, P. E. Laibinis, G. M. Whitesides, and M. S. Wrighton, "Electrochemical sensor-Prior concept," Science, vol. 254, no. 5031, pp. 501-502, Oct. 1991.
3. C. Ojeda and F. Rojas, "Recent development in optical chemical sensors coupling with flow injection analysis," Sensors, vol. 6, no. 10, pp. 1245-1307, Oct. 2006.
4. P. Kim, J. D. Albarella, J. R. Carey, M. J. Placek, A. Sen, A. E. Wittrig, and W. B. McNamara, "Towards the development of a portable device for the monitoring of gaseous toxic industrial chemicals based on a chemical sensor array," Sens. Actuators B, Chem., vol. 134, no. 1, pp. 307-312, Aug. 2008.
5. 2 surface of micro-cantilevers for long-term highly repeatable sensing to trace explosives," Nanotechnology, vol. 21, no. 26, p. 265501, Jun. 2010.
6. X. G. Luo, P. Liu, C. J. Hou, D. Q. Huo, J. L. Dong, H. B. Fa, and M. Yang, "A novel chemical detector using colorimetric sensor array and pattern recognition methods for the concentration analysis of NH3," Rev. Sci. Instrum., vol. 81, no. 10, p. 105113, Oct. 2010.
7. P. C. Xu, H. T. Yu, and X. X. Li, "Functionalized mesoporous silica for microgravimetric sensing of trace chemical vapors," Anal. Chem., vol. 83, no. 9, pp. 3448-3454, Apr. 2011.
8. S. Mehraeen, S. Jagannathan, and K. A. Corzine, "Energy harvesting from vibration with alternate scavenging circuitry and tapered cantilever beam," IEEE Trans. Ind. Electron., vol. 57, no. 3, pp. 820-829, Mar. 2010.
9. W. G. Li, S. He, and S. Yu, "Improving power density of a cantilever piezoelectric power harvester through a curved L-shaped proof mass," IEEE Trans. Ind. Electron., vol. 57, no. 3, pp. 868-876, Mar. 2010.
10. A. Frazier, R. Warrington, and C. Friedrich, "The miniaturization technologies-Past, present and future," IEEE Trans. Ind. Electron., vol. 42, no. 5, pp. 423-430, Oct. 1995.
11. Z. Tao and C. Yung, "New actuation method for push-pull electrostatic MEMS comb drive," IEEE Trans. Ind. Electron., vol. 50, no. 6, pp. 1337-1339, Dec. 2003.
12. Y. A. Chapuis, L. F. Zhou, Y. Fukuta, Y. Mita, and H. Fujita, "FPGA-based decentralized control of arrayed MEMS for microrobotic application," IEEE Trans. Ind. Electron., vol. 54, no. 4, pp. 1926-1936, Aug. 2007.
13. R. N. Dean and A. Luque, "Applications of microelectromechanical systems in industrial processes and services," IEEE Trans. Ind. Electron., vol. 56, no. 4, pp. 913-925, Apr. 2009.
14. B. Jang and A. Hassibi, "Biosensor systems in standard CMOS processes: Fact or fiction?," IEEE Trans. Ind. Electron., vol. 56, no. 4, pp. 979-985, Apr. 2009.
15. C.-D. Liao and J.-C. Tsai, "The evolution of MEMS displays," IEEE Trans. Ind. Electron., vol. 56, no. 4, pp. 1057-1065, Apr. 2009.
16. G. Stemme, "Resonant silicon sensors," J. Micromech. Microeng., vol. 1, no. 2, pp. 113-125, Jun. 1991.
17. N. Lavrik, M. Sepaniak, and P. Datskos, "Cantilever transducers as a platform for chemical and biological sensors," Rev. Sci. Instrum., vol. 75, no. 7, pp. 2229-2253, Jul. 2004.
18. H. T. Yu, X. X. Li, X. H. Gan, Y. J. Liu, X. Liu, P. C. Xu, J. G. Li, and M. Liu, "Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement," J. Micromech. Microeng., vol. 19, no. 4, p. 045023, Apr. 2009.
19. T. Betts, C. Tipple, M. Sepaniak, and P. Datskos, "Selectivity of chemical sensors based on micro-cantilevers coated with thin polymer films," Anal. Chim. Acta, vol. 422, no. 1, pp. 89-99, Oct. 2000.
20. J. W. Grate, "Hydrogen-bond acidic polymers for chemical vapor sensing," Chem. Rev., vol. 108, no. 2, pp. 726-745, Feb. 2008.
21. D. Lee, M. Yoo, H. Seo, Y. Tak, W. G. Kim, K. Yong, S. W. Rhee, and S. Jeon, "Enhanced mass sensitivity of ZnO nanorod-grown quartz crystal microbalances," Sens. Actuators B, Chem., vol. 135, no. 2, pp. 444-448, Jan. 2009.
22. P. C. Xu, X. X. Li, H. T. Yu, M. Liu, and J. G. Li, "Self-assembly and sensing-group graft of pre-modified CNTs on resonant micro-cantilevers for specific detection of volatile organic compound vapors," J. Micromech. Microeng., vol. 20, no. 11, p. 115003, Nov. 2010.
23. Y. Wan and D. Y. Zhao, "On the controllable soft-templating approach to mesoporous silicates," Chem. Rev., vol. 107, no. 7, pp. 2821-2860, Jul. 2007.
24. C. T. Kresge, M. E. Leonowicz, W. J. Roth, J. C. Vartuli, and J. S. Beck, "Ordered mesoporous molecular-sieves synthesized by a liquid-crystal template mechanism," Nature, vol. 359, no. 6397, pp. 710-712, Oct. 1992.
25. Y. F. Lu, R. Ganguli, C. A. Drewien, M. T. Anderson, C. J. Brinker, W. L. Gong, Y. X. Guo, H. Soyez, B. Dunn, M. H. Huang, and J. I. Zink, "Continuous formation of supported cubic and hexagonal mesoporous films by sol-gel dip-coating," Nature, vol. 389, no. 6649, pp. 364-368, Sep. 1997.
26. D. Y. Zhao, J. L. Feng, Q. S. Huo, N. Melosh, G. H. Fredrickson, B. F. Chmelka, and G. D. Stucky, "Triblock copolymer syntheses of mesoporous silica with periodic 50 to 300 angstrom pores," Science, vol. 279, no. 5350, pp. 548-552, Jan. 1998.
27. A. Stein, B. J. Melde, and R. C. Schroden, "Hybrid inorganic-organic mesoporous silicates-Nanoscopic reactors coming of age," Adv. Mater., vol. 12, no. 19, pp. 1403-1419, Oct. 2000.
28. 3 rings," Science, vol. 302, no. 5643, pp. 266-269, Oct. 2003.
29. N. G. Liu, R. A. Assink, B. Smarsly, and C. J. Brinker, "Synthesis and characterization of highly ordered functional mesoporous silica thin films with positively chargeable -NH2 groups," Chem. Commun., no. 10, pp. 1146-1147, Apr. 2003.
30. H. T. Yu and X. X. Li, "Bianalyte mass detection with a single resonant microcantilever," Appl. Phys. Lett., vol. 94, no. 1, p. 011901, Jan. 2009.
31. D. D'Alessandro, B. Smit, and J. Long, "Carbon dioxide capture: Prospects for new materials," Angew. Chem. Int. Ed., vol. 49, no. 35, pp. 6058-6082, Jul. 2010.
32. 2-sensing polysiloxane layers by modification of the polymerization," in Proc. IEEE Sens., Oct. 2009, pp. 1742-1746.