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Volumn 124, Issue 3, 2012, Pages 557-563
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Synthesis and characterization of nano silicon and titanium nitride powders using atmospheric microwave plasma technique
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Author keywords
Chemical synthesis; Microwave plasma; Nanoparticles; Scalable synthesis
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Indexed keywords
MICROWAVES;
NANOPARTICLES;
NANOSTRUCTURED MATERIALS;
NITRIDES;
POWDERS;
SILICON;
SYNTHESIS (CHEMICAL);
TITANIUM;
ATMOSPHERIC MICROWAVE PLASMA;
CHARACTERIZATION TECHNIQUES;
HOMOGENOUS NUCLEATION;
MICROWAVE PLASMA;
SCALABLE SYNTHESIS;
SILICON TETRACHLORIDE;
SYNTHESIS AND CHARACTERIZATIONS;
TITANIUM TETRACHLORIDES;
TITANIUM NITRIDE;
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EID: 84863683742
PISSN: 09743626
EISSN: 09737103
Source Type: Journal
DOI: 10.1007/s12039-012-0256-y Document Type: Article |
Times cited : (23)
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References (43)
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