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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 4, 2012, Pages

Electrochemical properties of sputter-deposited MoO 3 films in lithium microbatteries

(4) Ramana, C V a Atuchin, V V b Groult, H c Julien, C M c

a 500 W University Avenue (United States)

b INSTITUTE OF SEMICONDUCTOR PHYSICS (Russian Federation)

c SORBONNE UNIVERSITÉ (France)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLING BEHAVIOR; DISCHARGE-CHARGE; ELECTROCHEMICAL PERFORMANCE; GROWTH CONDITIONS; LITHIUM INTERCALATION; LITHIUM MICRO-BATTERY; LITHIUM MICROBATTERIES; OXYGEN PARTIAL PRESSURE; POLYCRYSTALLINE; REACTIVE ATMOSPHERES; VARIOUS SUBSTRATES;

LITHIUM; MICROSTRUCTURE; PHOTOELECTRONS; X RAY PHOTOELECTRON SPECTROSCOPY;

MOLYBDENUM OXIDE;

EID: 84863678318 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3701763 Document Type: Article

Times cited : (32)

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