Growth and surface characterization of sputter-deposited molybdenum oxide thin films

Applied Surface Science

Volumn 253, Issue 12, 2007, Pages 5368-5374

  Ramana, C V ^a   Atuchin, V V ^b   Kesler, V G ^c   Kochubey, V A ^b   Pokrovsky, L D ^b   Shutthanandan, V ^d   Becker, U ^a   Ewing, R C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

^c INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

^d PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

Growth; Microstructure; MoO 3 thin films; Oxygen pressure; Sputter deposition; Substrate temperature

Indexed keywords

FILM GROWTH; GAS MIXTURES; MOLYBDENUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SURFACE PHENOMENA;

MOO3 THIN FILMS; OXYGEN PRESSURE; SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 33847623678     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.12.012     Document Type: Article

References (33)

1. Granqvist C.G. Handbook of Inorganic Electrochromic Materials (1995), Elsevier
2. Sian T.S., and Reddy G.B. Appl. Surf. Sci. 236 (2004) 1
3. Lee S.H., Seong M.J., Tracy C.E., Mascarenhas A., Pitts J.R., and Deb S.K. Solid State Ionics 147 (2002) 129
4. Julien C. In: Pistoria G. (Ed). Lithium Batteries: New Materials, Developments and Perspectives (1994), Amsterdam, North-Holland
5. Li W., Cheng F., Tao Z., and Chen J. J. Phys. Chem. B 110 (2006) 119
6. Sian T.S., and Reddy D.B. J. Appl. Phys. 98 (2005) 026104
7. Bhosle V., Tiwari A., and Narayan J. J. Appl. Phys. 97 (2005) 083539
8. Gesheva K., Surtchev M., and Ivanova T. Solar Energy Mater. Solar Cells 76 (2003) 563
9. Yao J.N., Yang Y.A., and Loo B.H. J. Phys. Chem. B 102 (1998) 59
10. Okumu J., Koerfer F., Salinga C., and Wuttig M. J. Appl. Phys. 95 (2004) 7632
11. Prasad A.K., Kubinski D.J., and Gouma P.I. Sens. Actuators B 93 (2003) 25
12. Hosono K., Matsubara I., Murayama N., Woosuck S., and Izu N. Chem. Mater. 17 (2005) 349
13. Wang J., Rose K.C., and Lieber C.M. J. Phys. Chem. B 103 (1999) 8405
14. Julien C., Khelfa A., Hussain O.M., and Nazri G.A. J. Cryst. Growth 156 (1995) 235
15. Khilborg L. Ark. Kemi 21 (1963) 357
16. Parise J.B., McCarron III E.M., Von Dreele R., and Goldstone J.A. Solid State Commun. 93 (1991) 193
17. Altman E.I., Droubay T., and Chambers S.A. Thin Solid Films 414 (2002) 205
18. William Frank McClune (Ed.), Powder Diffraction File. Inorganic Phases, JCPDS-Int. Cent. Diff. Data, 1601 Parc Line, Swarthmore, Pensylvania 19081, USA.
19. M. Mayer, Technical Report IPP 9/113, Max-Planck-Institut fur Plasmaphysik, Garching, Germany, 1997.
20. Utsunomiya S., Palenik C., and Ewing R.C. In: Schwartz J.A., Contescu C.S., and Putyera K. (Eds). Encyclopedia of Nanoscience and Nanotechnology (2004), Marcel Dekker Inc., New York 1087
21. Swift P. Surf. Int. Anal. 2 (1982) 47
22. Atuchin V.V., Kalabin I.E., Kesler V.G., and Pervukhina N.V. J. Electron Spectrosc. Relat. Phenom. 142 (2005) 129
23. Atuchin V.V., Grigorieva T.I., Kalabin I.E., Kesler V.G., Pokrovsky L.D., and Shevtsov D.I. J. Cryst. Growth 275 (2005) e1603
24. Werfel F., and Minni E. J. Phys. C: Solid State Phys. 16 (1983) 6091
25. Khattak G.D., Salim M.A., Al-Harthi A.S., Thompson D.J., and Wenger L.E. J. Non-Cryst. Solids 212 (1997) 180
26. Sing M., Neudert R., von Lips H., Golden M.S., Knupfer M., Fink J., Claessen R., Mücke J., Schmitt H., Hüfner S., Lommel B., Aßmus W., Jung Ch., and Hellwig C. Phys. Rev. B 60 (1999) 8659
27. Khyzhun O.Yu., Strunskus T., Solonin M., and Yu M. J. Alloys Compd. 366 (2004) 54
28. C.D. Wagner, W.M. Riggs, L.E. Davis, J.F. Moulder, G.E. Muilenberg, Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer, Eden Prairie, Minnesota, 1979.
29. Song Z., Cai T., Chang Z., Liu G., Rodriguez J.A., and Hrbek J. J. Am. Chem. Soc. 125 (2003) 8059
30. Comini E., Faglia G., Sberveglieri G., Cantalini C., Passacantando M., Santucci S., Li Y., Wlodarski W., and Qu W. Sens. Actuators 68 (2000) 168
31. Gaingneoux E.M., Fukui K., and Iwasawa Y. Thin Solid Films 374 (2000) 49
32. Wu Y.G., Wu G.M., Ni X.Y., Zhou Z., Zhang H.Q., Xie H.Y., Jin Z.M., and Wu X. J. Inorg. Mater. 11 (1996) 633
33. Jiebing S., Rui X., Shimin W., Wufeng T., Hua T., and Jing S. J. Sol-Gel Sci. Technol. 27 (2003) 315