Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 365-371

  Larsen, Ulrik Darling ^a   Sigmund, Ole ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRICITY; FABRICATION; GLASS; MECHANISMS; MICROMACHINING; MICROSTRUCTURE; NUMERICAL METHODS; OPTIMIZATION; PRODUCT DESIGN; SEMICONDUCTING SILICON; TOPOLOGY;

ELECTROSTATIC COMB DRIVES; FAST PROTOTYPING; MATERIAL STRUCTURES; MICROMECHANISMS; NEGATIVE POISSON RATIO; ON CHIP INTEGRATED ACTUATION; THERMAL BIMORPH ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029732107     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)