Large-sized fabric tactile sensors for detecting contacted objects

Micro and Nano Letters

Volumn 5, Issue 6, 2010, Pages 389-392

  Kita, G ^a   Shikida, M ^a   Suzuki, Y ^a   Tsuji, Y ^a   Sato, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED LOADS; APPLIED PRESSURE; CONCENTRATED FORCE; DETECTING POINT; DETECTION PERFORMANCE; DETECTION POINT; DIFFERENT SIZES; FABRIC SENSORS; HOLLOW FIBRE; OBJECT DETECTION; PITCH VALUES; SENSOR OUTPUT; TACTILE SENSORS; VERTICAL DIRECTION;

CONDENSED MATTER PHYSICS; NANOSTRUCTURED MATERIALS;

SENSORS;

ARTICLE; CLOTHING; MICROELECTROMECHANICAL SYSTEM; PITCH; PRESSURE; SENSOR;

EID: 84863230450     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2010.0130     Document Type: Article

References (25)

1. Petersen, K.E.: ' Silicon as a mechanical material ', Proc. IEEE, 1982, 70, (5), p. 420-457 0018-9219
2. Muller, R.S., Howe, R.T., Senturia, S.D., Smith, R.L., and White, R.M.: ' Microsensor ', (IEEE Press, New York, 1991)
3. Yamasaki, H.: ' Handbook of sensors and actuators - intelligent sensors ', (Elsevier, 1996) 3
4. Ristic, L.: ' Sensor technology and devices ', (Artech House, 1994)
5. Maluf, N.: ' An introduction to microelectromechanical systems engineering ', (Artech House, 2000)
6. Chun, K.J., and Wise, K.D.: ' A capacitive silicon tactile image array ', Technical Digest of The Third Int. Conf. Solid-State Sensors and Actuators, 1985, p. 22-25 (Pubitemid 16598067)
7. Chu, Z., Sarro, P.M., and Middlehoek, S.: ' Silicon three-axial tactile sensor ', Technical Digest of The Eighth Int. Conf. Solid-State Sensors and Actuators, 1995, p. 656-659
8. Gray, B.L., and Fearing, R.S.: ' A surface micromachined microtactile sensor array ', IEEE Robot. Autom., 1996, 1, p. 1-6
9. Kane, B.J., Cutkosky, M.R., and Kovacs, G.T.A.: ' A traction stress sensor array for use in high-resolution robotic tactile imaging ', J. Microelectromech. Syst., 2000, 9, (4), p. 425-434 1057-7157 (Pubitemid 32169004)
10. Kasten, K., Amelung, J., and Mokwa, W.: ' CMOS-compatible capacitive high temperature pressure sensors ', Sens. Actuators A, phys., 2000, 85, p. 147-152 0924-4247
11. Takao, H., Yawata, M., Sawada, K., and Ishida, M.: ' A robust and sensitive silicon-MEMS tactile-imager with scratch resistant surface and over-range protection ', Technical Digest of The 14th Int. Conf. Solid-State Sensors, Actuators and Microsystems, 2007, p. 1465-1468
12. Shikida, M., Shimizu, T., Sato, K., and Itoigawa, K.: ' Active tactile sensor for detecting contact force and hardness of an object ', Sens. Actuators A, Phys., 2003, 103, p. 213-218 0924-4247
13. Hasegawa, Y., Shimizu, T., and Miyaji, T.: et al. ' A micromachined active tactile sensor for hardness detection ', Sens. Actuators A, Phys., 2004, 114, p. 141-146 0924-4247
14. Hasegawa, Y., Shikida, M., Sasaki, H., Itoigawa, K., and Sato, K.: ' An active tactile sensor for detecting mechanical characteristics of contacted objects ', J. Micromech. Microeng., 2006, 16, p. 1625-1632 0960-1317 (Pubitemid 44102313)
15. Kim, K., Lee, K.R., and Kim, Y.K.: et al. ' 3-axes flexible tactile sensor fabricated by Si micromachining and packaging technology ', Proc. IEEE MEMS'06, 2006, p. 678-681 (Pubitemid 44592384)
16. Engel, J., Chen, J., and Liu, C.: ' Development of polyimide flexible tactile sensor skin ', J. Micromech. Microeng., 2003, 13, p. 359-366 0960-1317
17. Kim, S.-H., Engel, J., Liu, C., and Jones, D.L.: ' Texture classification using a polymer-based MEMS tactile sensor ', J. Micromech. Microeng., 2005, 15, p. 912-920 0960-1317 (Pubitemid 41237419)
18. Lee, H.-K., Chang, S.-I., and Yoon, E.: ' A flexible polymer tactile sensor: fabrication and modular expandability for large area deployment ', J. Microelectromech. Syst., 2006, 15, (6), p. 1681-1686 1057-7157 (Pubitemid 44921787)
19. Hwang, E.-S., Seo, J.-h., and Kim, Y.-J.: ' A polymer-based flexible tactile sensor for both normal and shear load detections and its application for robotics ', J. Microelectromech. Syst., 2007, 16, (3), p. 556-563 1057-7157 (Pubitemid 47241356)
20. Konishi, S., Maeda, H., Ezaki, T., Kawato, M., Asajima, S., and Makikawa, M.: ' A selective stimulation of nerve bundles using a flexible multielectrode ', Technical Digest of The Tenth Int. Conf. Solid-State Sensors and Actuators, 1999, p. 276-279
21. Chen, N., Engel, J., Pandya, S., and Liu, C.: ' Flexible skin with two-axis bending capability made using weaving by-lithography fabrication method ', Proc. IEEE MEMS'06, 2006, p. 330-333 (Pubitemid 44592297)
22. Hasegawa, Y., Shikida, M., Ogura, D., and Sato, K.: ' Novel type of fabric tactile sensor made from artificial hollow fiber ', Proc. IEEE MEMS'07, 2007, p. 603-606
23. Hasegawa, Y., Shikida, M., Ogura, D., and Sato, K.: ' Glove type of wearable tactile sensor produced by artificial hollow fiber ', Technical Digest of The 14th Int. Conf. Solid-State Sensors, Actuators and Microsystems, 2007, p. 1453-1456
24. Hasegawa, Y., Shikida, M., Ogura, D., Suzuki, Y., and Sato, K.: ' Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber ', J. Micromech. Microeng., 2008, 18, p. 085014, 8pp 0960-1317
25. Kita, G., Suzuki, Y., Shikida, M., and Sato, K.: ' Fabric tactile sensor composed of ball-shaped umbonal fiber for detecting normal and lateral force ', Micro Nano Lett., 2010, 5, (4), p. 211-214