-
2
-
-
49749152562
-
A robust and sensitive silicon-MEMS tactile-imager with scratch resistant surface and over-range protection
-
Takao, H., Yawata, M., Sawada, K., and Ishida, M.: ' A robust and sensitive silicon-MEMS tactile-imager with scratch resistant surface and over-range protection ', Technical Digest 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, 2007, p. 1465-1468
-
(2007)
Technical Digest 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems
, pp. 1465-1468
-
-
Takao, H.1
Yawata, M.2
Sawada, K.3
Ishida, M.4
-
3
-
-
0037438982
-
Active tactile sensor for detecting contact force and hardness of an object
-
0924-4247
-
Shikida, M., Shimizu, T., Sato, K., and Itoigawa, K.: ' Active tactile sensor for detecting contact force and hardness of an object ', Sens. Actuators A, Phys., 2003, 103, p. 213-218 0924-4247
-
(2003)
Sens. Actuators A, Phys.
, vol.103
, pp. 213-218
-
-
Shikida, M.1
Shimizu, T.2
Sato, K.3
Itoigawa, K.4
-
4
-
-
4344612069
-
A micromachined active tactile sensor for hardness detection
-
0924-4247
-
Hasegawa, Y., Shimizu, T., and Miyaji, T.: et al. ' A micromachined active tactile sensor for hardness detection ', Sens. Actuators A, Phys., 2004, 114, p. 141-146 0924-4247
-
(2004)
Sens. Actuators A, Phys.
, vol.114
, pp. 141-146
-
-
Hasegawa, Y.1
Shimizu, T.2
Miyaji, T.3
-
5
-
-
33746300247
-
An active tactile sensor for detecting mechanical characteristics of contacted objects
-
0960-1317
-
Hasegawa, Y., Shikida, M., Sasaki, H., Itoigawa, K., and Sato, K.: ' An active tactile sensor for detecting mechanical characteristics of contacted objects ', J. Micromech. Microeng., 2006, 16, p. 1625-1632 0960-1317
-
(2006)
J. Micromech. Microeng.
, vol.16
, pp. 1625-1632
-
-
Hasegawa, Y.1
Shikida, M.2
Sasaki, H.3
Itoigawa, K.4
Sato, K.5
-
6
-
-
0029489275
-
Silicon three-axial tactile sensor
-
Chu, Z., Sarro, P.M., and Middlehoek, S.: ' Silicon three-axial tactile sensor ', Technical Digest Eighth Int. Conf. on Solid-State Sensors and Actuators, 1995, p. 656-659
-
(1995)
Technical Digest Eighth Int. Conf. on Solid-State Sensors and Actuators
, pp. 656-659
-
-
Chu, Z.1
Sarro, P.M.2
Middlehoek, S.3
-
7
-
-
0029704850
-
A surface micromachined microtactile sensor array
-
Gray, B.L., and Fearing, R.S.: ' A surface micromachined microtactile sensor array ', IEEE Robot. Autom., 1996, p. 1-6
-
(1996)
IEEE Robot. Autom.
, pp. 1-6
-
-
Gray, B.L.1
Fearing, R.S.2
-
8
-
-
0034467107
-
A traction stress sensor array for use in high-resolution robotic tactile imaging
-
1057-7157
-
Kane, B.J., Cutkosky, M.R., and Kovacs, G.T.A.: ' A traction stress sensor array for use in high-resolution robotic tactile imaging ', J. Microelectromech. Syst., 2000, 9, (4), p. 425-434 1057-7157
-
(2000)
J. Microelectromech. Syst.
, vol.9
, Issue.4
, pp. 425-434
-
-
Kane, B.J.1
Cutkosky, M.R.2
Kovacs, G.T.A.3
-
9
-
-
0034249105
-
CMOS-compatible capacitive high temperature pressure sensors
-
0924-4247
-
Kasten, K., Amelung, J., and Mokwa, W.: ' CMOS-compatible capacitive high temperature pressure sensors ', Sens. Actuators A, Phys., 2000, 85, p. 147-152 0924-4247
-
(2000)
Sens. Actuators A, Phys.
, vol.85
, pp. 147-152
-
-
Kasten, K.1
Amelung, J.2
Mokwa, W.3
-
10
-
-
0020127035
-
Silicon as a mechanical material
-
0018-9219
-
Petersen, K.E.: ' Silicon as a mechanical material ', Proc. IEEE, 1982, 70, (5), p. 420-457 0018-9219
-
(1982)
Proc. IEEE
, vol.70
, Issue.5
, pp. 420-457
-
-
Petersen, K.E.1
-
11
-
-
33746303954
-
Three-axes flexible tactile sensor fabricated by Si micromachining and packaging technology
-
Kim, K., Lee, K.R., and Kim, Y.K.: et al. ' Three-axes flexible tactile sensor fabricated by Si micromachining and packaging technology ', Proc. IEEE MEMS'06, 2006, p. 678-681
-
(2006)
Proc. IEEE MEMS'06
, pp. 678-681
-
-
Kim, K.1
Lee, K.R.2
Kim, Y.K.3
-
12
-
-
0038353936
-
Development of polyimide flexible tactile sensor skin
-
0960-1317
-
Engel, J., Chen, J., and Liu, C.: ' Development of polyimide flexible tactile sensor skin ', J. Micromech. Microeng., 2003, 13, p. 359-366 0960-1317
-
(2003)
J. Micromech. Microeng.
, vol.13
, pp. 359-366
-
-
Engel, J.1
Chen, J.2
Liu, C.3
-
13
-
-
24144472495
-
Texture classification using a polymer-based MEMS tactile sensor
-
0960-1317
-
Kim, S.-H., Engel, J., Liu, C., and Jones, D.L.: ' Texture classification using a polymer-based MEMS tactile sensor ', J. Micromech. Microeng., 2005, 15, p. 912-920 0960-1317
-
(2005)
J. Micromech. Microeng.
, vol.15
, pp. 912-920
-
-
Kim, S.-H.1
Engel, J.2
Liu, C.3
Jones, D.L.4
-
14
-
-
33845517787
-
A flexible polymer tactile sensor: Fabrication and modular expandability for large area deployment
-
1057-7157
-
Lee, H.-K., Chang, S.-I., and Yoon, E.: ' A flexible polymer tactile sensor: fabrication and modular expandability for large area deployment ', J. Microelectromech. Syst., 2006, 15, (6), p. 1681-1686 1057-7157
-
(2006)
J. Microelectromech. Syst.
, vol.15
, Issue.6
, pp. 1681-1686
-
-
Lee, H.-K.1
Chang, S.-I.2
Yoon, E.3
-
15
-
-
34547810491
-
A polymer-based flexible tactile sensor for both normal and shear load detections and its application for robotics
-
1057-7157
-
Hwang, E.-S., Seo, J.-H., and Kim, Y.-J.: ' A polymer-based flexible tactile sensor for both normal and shear load detections and its application for robotics ', J. Microelectromech. Syst., 2007, 16, (3), p. 556-563 1057-7157
-
(2007)
J. Microelectromech. Syst.
, vol.16
, Issue.3
, pp. 556-563
-
-
Hwang, E.-S.1
Seo, J.-H.2
Kim, Y.-J.3
-
16
-
-
0006293153
-
A selective stimulation of nerve bundles using a flexible multielectrode
-
Konishi, S., Maeda, H., Ezaki, T., Kawato, M., Asajima, S., and Makikawa, M.: ' A selective stimulation of nerve bundles using a flexible multielectrode ', Technical Digest Tenth Int. Conf. on Solid-State Sensors and Actuators, 1999, p. 276-279
-
(1999)
Technical Digest Tenth Int. Conf. on Solid-State Sensors and Actuators
, pp. 276-279
-
-
Konishi, S.1
Maeda, H.2
Ezaki, T.3
Kawato, M.4
Asajima, S.5
Makikawa, M.6
-
17
-
-
33750116912
-
Flexible skin with two-axis bending capability made using weaving by-lithography fabrication method
-
Chen, N., Engel, J., Pandya, S., and Liu, C.: ' Flexible skin with two-axis bending capability made using weaving by-lithography fabrication method ', Proc. IEEE MEMS'06, 2006, p. 330-333
-
(2006)
Proc. IEEE MEMS'06
, pp. 330-333
-
-
Chen, N.1
Engel, J.2
Pandya, S.3
Liu, C.4
-
18
-
-
49749109884
-
Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber
-
0960-1317 (8pp
-
Hasegawa, Y., Shikida, M., Ogura, D., Suzuki, Y., and Sato, K.: ' Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber ', J. Micromech. Microeng., 2008, 18, p. 085014 (8pp.) 0960-1317
-
(2008)
J. Micromech. Microeng.
, vol.18
, pp. 085014
-
-
Hasegawa, Y.1
Shikida, M.2
Ogura, D.3
Suzuki, Y.4
Sato, K.5
-
19
-
-
50049094223
-
Glove type of wearable tactile sensor produced by artificial hollow fiber
-
Hasegawa, Y., Shikida, M., Ogura, D., and Sato, K.: ' Glove type of wearable tactile sensor produced by artificial hollow fiber ', Technical Digest 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, 2007, p. 1453-1456
-
(2007)
Technical Digest 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems
, pp. 1453-1456
-
-
Hasegawa, Y.1
Shikida, M.2
Ogura, D.3
Sato, K.4
-
20
-
-
71449111737
-
Development of fabric force sensor for detecting normal and lateral force by applying umbonal fiber
-
Denver, USA, June
-
Kita, G., Suzuki, Y., Shikida, M., and Sato, K.: ' Development of fabric force sensor for detecting normal and lateral force by applying umbonal fiber ', Technical Digest 15th Int. Conf. on Solid-State Sensors and Actuators, Denver, USA, June, 2009, p. 1746-1749
-
(2009)
Technical Digest 15th Int. Conf. on Solid-State Sensors and Actuators
, pp. 1746-1749
-
-
Kita, G.1
Suzuki, Y.2
Shikida, M.3
Sato, K.4
|