Pretreatment of polyethylene terephthalate substrate for the growth of Ga-doped ZnO thin film

Journal of Nanoscience and Nanotechnology

Volumn 11, Issue 2, 2011, Pages 1617-1620

  Kim, D W ^a,b   Kang, J H ^a,b   Lim, Y S ^a   Lee, M H ^a   Seo, W S ^a   Park, H H ^b   Seo, K H ^c   Park, M G ^c  

^a Korea Institute of Ceramic Engineering and Technology (KICET)   (South Korea)

^b Yonsei University   (South Korea)

^c LG Display Co Ltd   (South Korea)

Author keywords

Annealing; Polyethylene terephthalate; Sputtering; Transparent conducting oxide; ZnO

Indexed keywords

4-POINT PROBE; GA-DOPED ZNO; GAS PERMEATION; HALL MEASUREMENTS; MOISTURE ABSORPTION; PET SUBSTRATE; PLASTIC SUBSTRATES; PRE-TREATMENT; RF-MAGNETRON SPUTTERING; SPUTTERING GROWTH; STRUCTURAL CHARACTERIZATION; TRANSPARENT CONDUCTING OXIDE; VACUUM CHAMBERS; ZNO;

ANNEALING; ELECTRIC PROPERTIES; GALLIUM; GALLIUM ALLOYS; POLYETHYLENE TEREPHTHALATES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; THIN FILMS; ZINC OXIDE;

SUBSTRATES;

EID: 84863012245     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.3355     Document Type: Conference Paper

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