The effects of the microstructure of ZnO films on the electrical performance of their thin film transistors

Applied Physics Letters

Volumn 93, Issue 22, 2008, Pages

  Hwang, Byung Il ^a   Park, Kyung ^a   Chun, Ha Suk ^a   An, Chee Hong ^a   Kim, Hyoungsub ^a   Lee, Hoo Jeong ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH RESOLUTION ELECTRON MICROSCOPY; METALLIC FILMS; MICROSTRUCTURE; SEMICONDUCTING ZINC COMPOUNDS; THICK FILMS; THIN FILM DEVICES; THIN FILM TRANSISTORS; THIN FILMS; TRANSISTORS; ZINC ALLOYS; ZINC OXIDE;

DEPOSITION CONDITIONS; DEVICE PERFORMANCES; ELECTRICAL MOBILITIES; ELECTRICAL PERFORMANCES; EXPONENTIAL FUNCTIONS; GRAIN SIZES; RF POWERS; X-RAY DIFFRACTIONS; ZNO FILMS;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 57349119889     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3031726     Document Type: Article

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