SCOPUS 정보 검색 플랫폼

Optics and Lasers in Engineering

Volumn 50, Issue 6, 2012, Pages 833-837

Vibration assisted femtosecond laser machining on metal

(3) Park, Jung Kyu a,b Yoon, Ji Wook a,b Cho, Sung Hak a,b

a Korea Institute of Machine and Materials (South Korea)

b University of Science and Technology (UST) (South Korea)

Author keywords

Drilling; Femtosecond laser; Micro via; Surface quality; Vibration assisted machining

Indexed keywords

CENTRAL WAVELENGTH; FEMTO-SECOND LASER; FEMTOSECOND LASER MACHINING; FREQUENCY VIBRATION; FS LASER; FS PULSE; LASER MACHINING; LOW-FREQUENCY VIBRATION; MICRO VIA; OBJECTIVE LENS; REPETITION RATE; SIDE WALLS; TI:SAPPHIRE; VIBRATION ASSISTED; WALL SURFACES;

DRILLING; MACHINING; MACHINING CENTERS; OPTICAL INSTRUMENT LENSES; SAPPHIRE; SURFACE PROPERTIES; SURFACE ROUGHNESS; ULTRASHORT PULSES;

ASPECT RATIO;

EID: 84862813067 PISSN: 01438166 EISSN: None Source Type: Journal
DOI: 10.1016/j.optlaseng.2012.01.017 Document Type: Article

Times cited : (39)

References (25)

1
- 0035899361
- S. Kawata, H.B. Sun, T. Tanaka, and K. Takada Nature 412 2001 697 698
- (2001) Nature , vol.412 , pp. 697-698
- Kawata, S.¹ Sun, H.B.² Tanaka, T.³ Takada, K.⁴

2
- 3042839181
- M. Deubel, G.V. Freymann, M. Wegener, S. Pereira, K. Busch, and C.M. Soukoulis Nat Mater 3 2004 444 447
- (2004) Nat Mater , vol.3 , pp. 444-447
- Deubel, M.¹ Freymann, G.V.² Wegener, M.³ Pereira, S.⁴ Busch, K.⁵ Soukoulis, C.M.⁶

3
- 33646500842
- J.P. McDonald, V.R. Mistry, K.E. Ray, and S.M. Yalisove Appl Phys Lett 88 2006 183113
- (2006) Appl Phys Lett , vol.88 , pp. 183113
- McDonald, J.P.¹ Mistry, V.R.² Ray, K.E.³ Yalisove, S.M.⁴

4
- 41549088314
- R.R. Gattass, and E. Mazur Nat Photonics 2 2008 219 225
- (2008) Nat Photonics , vol.2 , pp. 219-225
- Gattass, R.R.¹ Mazur, E.²

5
- 77950871494
- Rajesh Mandamparambil, Henri Fledderus, Geert Van Steenberge, and Andreas Dietzel Opt Express 18 2010 7575 7583
- (2010) Opt Express , vol.18 , pp. 7575-7583
- Mandamparambil, R.¹ Fledderus, H.² Van Steenberge, G.³ Dietzel, A.⁴

6
- 0030211787
- B.N. Chichkov, C. Momma, S. Nolte, F.V. Alvensleben, and A. Tünnermann Appl Phys A 63 1996 109 115
- (1996) Appl Phys A , vol.63 , pp. 109-115
- Chichkov, B.N.¹ Momma, C.² Nolte, S.³ Alvensleben, F.V.⁴ Tünnermann, A.⁵

7
- 0032614534
- S. Nolte, B.N. Chichkov, H. Welling, Y. Shani, K. Liebermann, and H. Terkel Opt Lett 24 1999 914 916
- (1999) Opt Lett , vol.24 , pp. 914-916
- Nolte, S.¹ Chichkov, B.N.² Welling, H.³ Shani, Y.⁴ Liebermann, K.⁵ Terkel, H.⁶

8
- 0038374098
- A. Borowiec, and H.K. Haugen Appl Phys Lett 82 2003 4462 4464
- (2003) Appl Phys Lett , vol.82 , pp. 4462-4464
- Borowiec, A.¹ Haugen, H.K.²

9
- 0037451426
- Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, and X. Chen Appl Phys Lett 82 2003 1703 1705
- (2003) Appl Phys Lett , vol.82 , pp. 1703-1705
- Wu, Q.¹ Ma, Y.² Fang, R.³ Liao, Y.⁴ Yu, Q.⁵ Chen, X.⁶

10
- 18844440921
- J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B.N. Chichkov Appl Phys A 81 2005 325 328
- (2005) Appl Phys A , vol.81 , pp. 325-328
- Koch, J.¹ Korte, F.² Bauer, T.³ Fallnich, C.⁴ Ostendorf, A.⁵ Chichkov, B.N.⁶

11
- 33645092662
- A.Y. Vorobyev, and Chunlei Guo Opt Express 14 2006 2164 2169
- (2006) Opt Express , vol.14 , pp. 2164-2169
- Vorobyev, A.Y.¹ Guo, C.²

12
- 34247208687
- T. Tomita, K. Kinoshita, S. Matsuo, and S. Hashimoto Appl Phys Lett 90 2007 153115
- (2007) Appl Phys Lett , vol.90 , pp. 153115
- Tomita, T.¹ Kinoshita, K.² Matsuo, S.³ Hashimoto, S.⁴

13
- 34548656924
- Jincheng Wang, and Chunlei Guo J Appl Phys 102 2007 053522
- (2007) J Appl Phys , vol.102 , pp. 053522
- Wang, J.¹ Guo, C.²

14
- 56149127149
- Min Huang, Fuli Zhao, Ya Cheng, Ningsheng Xu, and Zhizhan Xu Opt Express 16 23 2008 19354 19365
- (2008) Opt Express , vol.16 , Issue.23 , pp. 19354-19365
- Huang, M.¹ Zhao, F.² Cheng, Y.³ Xu, N.⁴ Xu, Z.⁵

15
- 70350629895
- A. Ancona, S. Döring, C. Jauregui, F. Röser, J. Limpert, and S. Nolte Opt Lett 34 2009 3304 3306
- (2009) Opt Lett , vol.34 , pp. 3304-3306
- Ancona, A.¹ Döring, S.² Jauregui, C.³ Röser, F.⁴ Limpert, J.⁵ Nolte, S.⁶

16
- 70349684803
- Taek Yong Hwang, A.Y. Vorobyev, and Chunlei Guo Appl Phys Lett 95 2009 123111
- (2009) Appl Phys Lett , vol.95 , pp. 123111
- Hwang, T.Y.¹ Vorobyev, A.Y.² Guo, C.³

17
- 34547665036
- H.Y. Zheng, and H. Huang J Micromech Microeng 17 2007 N58 N61
- (2007) J Micromech Microeng , vol.17
- Zheng, H.Y.¹ Huang, H.²

18
- 84862806045
- A. Hu,1, Y. Zhou1, and W.W. Duley Open Surf Sci J 3 2011 42 49
- (2011) Open Surf Sci J , vol.3 , pp. 42-49
- Hu, A.¹ Zhou, Y.² Duley, W.W.³

19
- 34848894173
- A. Hu, M. Rybachuk, Q.-B. Lu, and W.W. Duley Appl Phys Lett 91 2007 1319061 1319063
- (2007) Appl Phys Lett , vol.91 , pp. 1319061-1319063
- Hu, A.¹ Rybachuk, M.² Lu, Q.-B.³ Duley, W.W.⁴

20
- 84902569661
- Woodhead Publishing Ltd., CRC Press Cambridge, England
- Y. Zhou Microjoining and nanojoining 2008 Woodhead Publishing Ltd., CRC Press Cambridge, England
- (2008) Microjoining and Nanojoining
- Zhou, Y.¹

21
- 19744383815
- A.Y. Vorobyev, and Chunlei Guo Appl Phys Lett 82 2005 011916
- (2005) Appl Phys Lett , vol.82 , pp. 011916
- Vorobyev, A.Y.¹ Guo, C.²

22
- 19744383815
- A.Y. Vorobyev, and C. Guo Appl Phys Lett 86 2005 011916
- (2005) Appl Phys Lett , vol.86 , pp. 011916
- Vorobyev, A.Y.¹ Guo, C.²

23
- 42749109041
- S. Eliezer, N. Eliaz, E. Grossman, D. Fisher, I. Gouzman, and Z. Henis Phys Rev B 69 2004 144119
- (2004) Phys Rev B , vol.69 , pp. 144119
- Eliezer, S.¹ Eliaz, N.² Grossman, E.³ Fisher, D.⁴ Gouzman, I.⁵ Henis, Z.⁶

24
- 15444364667
- S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitello, and X. Wang Phys Rev B 71 2005 033406
- (2005) Phys Rev B , vol.71 , pp. 033406
- Amoruso, S.¹ Ausanio, G.² Bruzzese, R.³ Vitello, M.⁴ Wang, X.⁵

25
- 30344469939
- H.J. Kim, and J.H. Jeong Heat Transfer Eng 27 2006 14 22
- (2006) Heat Transfer Eng , vol.27 , pp. 14-22
- Kim, H.J.¹ Jeong, J.H.²

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