Ultrasonic vibration-assisted femtosecond laser machining of microholes

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages

  Zheng, H Y ^a   Huang, H ^b  

^a The University of New South Wales Singapore   (Singapore)

^b UNIVERSITY OF QUEENSLAND   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DRILLING; LASER BEAM EFFECTS; MICROMACHINING; ULTRASHORT PULSES; ULTRASONIC TESTING; VIBRATION ANALYSIS;

LASER DRILLING; ULTRASONIC VIBRATORS;

MICROSTRUCTURE;

EID: 34547665036     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/N03     Document Type: Article

References (11)

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