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Volumn 258, Issue 16, 2012, Pages 5987-5991
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A study of high-quality freestanding diamond films grown by MPCVD
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Author keywords
Freestanding diamond films; Microwave Plasma Chemical Vapor Deposition; Optical transmission; Texture
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Indexed keywords
LIGHT TRANSMISSION;
MICROWAVES;
OPTICAL DATA PROCESSING;
PLASMA CVD;
PLASMA DIAGNOSTICS;
TEXTURES;
X RAY DIFFRACTION;
CRYSTALLINE STRUCTURE;
FABRICATION PROCESS;
FREE-STANDING DIAMOND FILMS;
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS;
OPTICAL MEASUREMENT;
OPTIMAL CONDITIONS;
PROCESSING CONDITION;
SUBSTRATE TEMPERATURE;
DIAMOND FILMS;
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EID: 84862782002
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2012.02.025 Document Type: Article |
Times cited : (43)
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References (22)
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