Surface acoustic waves in ZnO/Al xGa 1-xN/C-Al 2O 3 structures

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 2130-2133

  Chen, Ying ^a   Emanetoglu, N W ^a   Chen, Yimin ^a   Saraf, G ^a   Lu, Y ^a   Parekh, A ^b   Merai, V ^b   Prophristic, M ^b   Lu, D ^b   Lee, D S ^b   Armour, E A ^b  

^a RUTGERS UNIVERSITY   (United States)

^b EMCORE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILAYER SYSTEMS; PARASITIC GAS PHASE REACTIONS; SAPPHIRE SUBSTRATES; SURFACE ACOUSTIC WAVES (SAW);

ALUMINUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; ELECTRIC FREQUENCY CONTROL; EPITAXIAL GROWTH; PIEZOELECTRIC MATERIALS; RAYLEIGH SCATTERING; SIGNAL PROCESSING; ZINC OXIDE;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 84862404778     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. J.G. Gualtieri, J.A. Kosinski, A. Ballato, "Piezoelectric Materials for Acoustic Wave Applications", IEEE Trans. Ultrasonics, Ferroelectrics and Freq. Cont., vol. 41, n.1, 53-59, 1994
2. 1-xN Thin Films Obtained by Surface Acoustic Wave Measurements", Appl. Phys. Lett., 72(19), p. 2400, May 1998
3. Th. Pastureaud, A. Soufyane, S. Camou and S. Ballandras, "AlN and GaN Layers Deposited on Sapphire or Silicon Substrates: Theory and Experiment", 2000 IEEE Ultrasonics Symposium, pp.293-297, 2000
4. Y. Takagaki, P. V. Santos, E. Wiebicke, O. Brandt, etc. "Superhigh-frequency Surface-acoustic- wave Transducers using AlN Layers Grown on SiC Substrates", Appl. Phys. Lett., 81(14), p. 2538, Sept. 2002.
5. Y.J.Kim, G. H. Lim, K.H.Choi, S.J. Chung, H.J.Kim, H.Park, H. S. Park, "SAW Characteristics of GaN Epitxial Films Deposited on Different Plane Sapphire Substrates Using MOCVD", Proc. 2002 IEEE Ultrasonics Symposium, pp.412-415, 2002
6. Soh Ju-Won; Lee Won-Jong; Park Jang-Ho; Lee Soong-Won, "SAW characteristics of AlN films deposited on various substrates using ECR plasma enhanced CVD and reactive RF sputtering", Proc. 1996 IEEE Ultrasonics Symposium, Vol.1, pp. 299-302, 1996
7. M.B. Assouar, O. Elmazria, L. Le Brizoual, M. Belmahi, P. Alnot, "Growth of piezoelectric aluminium nitride for layered SAW devices", Proc. 2002 IEEE Freq. Control Symp., pp. 333-336, 2002
8. N.W. Emanetoglu, G. Patounakis, S. Liang, C.R. Gorla, R. Wittstruck, Y. Lu, "Analysis of SAW Properties of Epitaxial ZnO Films Grown on r-Al2O3 Substrates," IEEE Trans. Ultrasonics, Ferroelectrics and Freq. Cont., vol. 48, n.5, 1389-94, Sept. 2001
9. E. L Adler, "Matrix methods applied to acoustic waves in multilayers," IEEE Trans. Ultrasonics, Ferroelectrics and Freq. Cont., vol. 37, no. 6, pp. 485-490, Nov. 1990.