A pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantilever

Review of Scientific Instruments

Volumn 83, Issue 5, 2012, Pages

  Seo, Dongjin ^a   Paul, Mark R ^a   Ducker, William A ^a  

^a Virginia Polytechnic Institute and State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM CANTILEVERS; ATOMIC FORCE MICROSCOPE CANTILEVERS; CANTILEVER MOTION; CONTINUUM HYPOTHESIS; EQUATION OF STATE; GAS DENSITY; GAS DENSITY MEASUREMENT; HARMONIC OSCILLATORS; LOWER PRESSURES; MEASUREMENT TECHNIQUES; MINIMUM PRESSURE; PRESSURE GAUGES; PRESSURE READING; RESONANCE FREQUENCIES;

DENSITY OF GASES; NANOCANTILEVERS;

ATOMIC FORCE MICROSCOPY;

EID: 84862122044     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4717678     Document Type: Review

References (25)

1. A. Ellett and R. M. Zabel, Phys. Rev. 37, 1102 (1931). 10.1103/PhysRev.37.1102
2. J. F. O'Hanlon, A Users Guide to Vacuum Technology, 3rd ed. (Wiley, Hoboken, 2003), p. 89.
3. W. P. Eaton and J. H. Smith, Smart Mater. Struct. 6, 530 (1997). 10.1088/0964-1726/6/5/004
4. F. G. Barth, J. A. C. Humphrey, and T. W. Secom, Sensors and Sensing in Biology and Engineering (Springer-Verlag, New York, 2003), pp. 338-341.
5. A. Raman, J. Melcher, and R. Tung, Nanotoday 3, 20 (2008). 10.1016/S1748-0132(08)70012-4
6. S. Bianco, M. Cocuzza, S. Ferrero, E. Giuri, G. Piacenza, C. F. Pirri, A. Ricci, L. Scaltrito, D. Bich, A. Merialdo, P. Schina, and R. Correale, J. Vac. Sci. Technol. 24, 1803 (2006). 10.1116/1.2214698
7. R. G. Christian, Vacuum 16, 175 (1966). 10.1016/0042-207X(66)91162-6
8. M. Bao, H. Yang, H. Yin, and Y. Sun, J. Micromech. Microeng. 12, 341 (2002). 10.1088/0960-1317/12/3/322
9. H. Hosaka, K. Itao, and S. Kuroda, Sens. Actuators, A 49, 87 (1995). 10.1016/0924-4247(95)01003-J
10. K. L. Ekinci, V. Yakhot, S. Rajauria, C. Colosqui, and D. M. Karabacak, Lab Chip 10, 3013 (2010). 10.1039/c003770m
11. J. Lübbe, H. Schnieder, and M. Reichling, e-J. Surf. Sci. Nanotech. 9, 30 (2011). 10.1380/ejssnt.2011.30
12. G. Keskar, B Elliott, J Gaillard, M. J. Skove, and A. M. Rao, Sens Actuators, A 147, 203 (2008). 10.1016/j.sna.2008.04.017
13. V. Mortet, R. Petersen, K. Haenen, and M. D'Olieslaeger, Appl. Phys. Lett. 88, 133511 (2006). 10.1063/1.2190462
14. M. R. Paul and M. C. Cross, Phys. Rev. Lett. 92, 235501 (2004). 10.1103/PhysRevLett.92.235501
15. H.-J. Butt and M. Jaschke, Nanotechnology 6, 1 (1995). 10.1088/0957-4484/6/1/001
16. E. O. Tuck, J. Eng. Math. 3, 29 (1969). 10.1007/BF01540828
17. L. Rosenhead, Laminar Boundary Layers (Oxford University Press, Oxford, 1963).
18. R. J. Clarke, O. E. Jensen, J. Billingham, A. P. Pearson, and P. M. Williams, Phys. Rev. Lett. 96, 050801 (2006). 10.1103/PhysRevLett.96.050801
19. J. E. Sader, J. Appl. Phys. 84, 1 (1998). 10.1063/1.368002
20. M. R. Paul, M. T. Clark, and M. C. Cross, Nanotechnology 17, 4502 (2006). 10.1088/0957-4484/17/17/037
21. See http://www.brukerafmprobes.com/Product.aspx?ProductID=3378 for more information about the cantilevers.
22. J. L. Hutter and J. Bechhoefer, Rev. Sci. Instrum. 64, 1868 (1993). 10.1063/1.1143970
23. See http://www.digivac.com/get-educated/digivac-accuracy.html for more information about Digivac 276.
24. S. Kaka, L. L. Vasiliev, Y. Bayazitoglu, and Y. Yener, Microscale Heat Transfer: Fundamentals and Applications (Springer, Norwell, 2004), p. 3.
25. P. T. Tsilingiris, Energy Convers. Manage 49, 1098 (2008). 10.1016/j.enconman.2007.09.015