Femtosecond laser-induced line structuring on mold stainless steel STAVAX with various scanning speeds and two polarization configurations

International Journal of Precision Engineering and Manufacturing

Volumn 13, Issue 6, 2012, Pages 845-854

  Choi, Sang Hoon ^a   Sohn, Ik Bu ^b   Lee, Ho ^a  

^a Kyungpook National University   (South Korea)

^b Advanced Photonics research Institute   (South Korea)

Author keywords

Ablation; Femtosecond laser; Micromachining; Mold stainless steel; Nano texturing; Ripple

Indexed keywords

ABLATION; IRRADIATION; LASER BEAMS; MICROMACHINING; MOLDS; NANOTECHNOLOGY; POLARIZATION; SCANNING; SPEED; STAINLESS STEEL;

DAMAGE THRESHOLD; LASER INDUCED PERIODIC STRUCTURES; LASER PARAMETERS; LINE STRUCTURES; NANOSCALE STRUCTURE; NANOTEXTURING; RIPPLE; SINGLE-PULSE IRRADIATION;

FEMTOSECOND LASERS;

EID: 84861903131     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-012-0110-7     Document Type: Article

References (19)

1. Morales, A. M. and Lieber, C. M., "A laser ablation method for the synthesis of crystalline semiconductor nanowires," Science, Vol. 279, No. 5348, pp. 208-211, 1998.
2. Venkatakrishnan, K., Ngoi, B. K. A., Stanley, P., Lim, L. E. N., Tan, B., and Sivakumar, N. R., "Laser writing techniques for photomask fabrication using a femtosecond laser," Applied Physics A: Materials Science & Processing, Vol. 74, No. 4, pp. 493-496, 2002.
3. Lauzurica, S., García-Ballesteros, J. J., Colina, M., Sánchez-Aniorte, I., and Molpeceres, C., "Selective ablation with UV lasers of a-Si:H thin film solar cells in direct scribing configuration," Applied Surface Science, Vol. 257, No. 12, pp. 5230-5236, 2011.
4. Walsh, L. J., "The current status of laser applications in dentistry," Australian Dental Journal, Vol. 48, No. 3, pp. 146-155, 2003.
5. Feit, M. D., Rubenchik, A. M., Kim, B. M., da Silva, L. B., and Perry, M. D., "Physical characterization of ultrashort laser pulse drilling of biological tissue," Applied Surface Science, Vol. 127-129, pp. 869-874, 1998.
6. Perry, M. D., Stuart, B. C., Banks, P. S., Feit, M. D., and Yanovsky, V., "Ultrashort-pulse laser machining of dielectric materials," Journal of Applied Physics, Vol. 85, No. 9, pp. 6803-6810, 1999.
7. Lee, Y. H. and Choi, K. J., "Analysis of Silicon via Hole Drilling for Wafer Level Chip Stacking by UV Laser," Int. J. Precis. Eng. Manuf., Vol. 11, No. 4, pp. 501-507, 2010.
8. Momma, C., Chichkov, B. N., Nolte, S., Alvensleben, F. V., Tünnermann, A., Welling, H., and Wellegehausen, B., "Short-pulse laser ablation of solid targets," Optics Communications, Vol. 129, No. 1-2, pp. 134-142, 1996.
9. Chichkov, B. N., Momma, C., Nolte, S., Alvensleben, F. V., and Tünnermann, A., "Femtosecond, picosecond and nanosecond laser ablation of solids," Applied Physics A: Materials Science & Processing, Vol. 63, No. 2, pp. 109-115, 1996.
10. Sohn, I. B., Noh, Y. C., Choi, S. C., Ko, D. K., Lee, J. M., and Choi, Y. J., "Femtosecond laser ablation of polypropylene for breathable film," Applied Surface Science, Vol. 254, No. 16, pp. 4919-4924, 2008.
11. Suriano, R., Kuznetsov, A., Eaton, S. M., Kiyan, R., Cerullo, G., Osellame, R., Chichkov, B. N., Levi, M., and Turri, S., "Femtosecond laser ablation of polymeric substrates for the fabrication of microfluidic channels," Applied Surface Science, Vol. 257, No. 14, pp. 6243-6250, 2011.
12. Sohn, I. B., Lee, M. S., and Woo, J. S., "Femtosecond micromachining applications for optical devices," Journal of the Optical Society of Korea, Vol. 8, No. 3, pp. 127-131, 2004.
13. Sohn, I. B., Kim, Y. S., Noh, Y. C., Ryu, J. C., and Kim, J. T., "Microstructuring of Optical Fibers Using a Femtosecond Laser," Journal of the Optical Society of Korea, Vol. 13, No. 1, pp. 33-36, 2009.
14. Buzzonetti, L., Petrocelli, G., Valente, P., Tamburrelli, C., Mosca, L., Laborante, A., and Balestrazzi, E., "Comparison of corneal aberration changes after laser in situ keratomileusis performed with mechanical microkeratome and IntraLase femtosecond laser: 1-year follow up," Cornea, Vol. 27, No. 2, pp. 174-179, 2008.
15. Choi, S. H., Kim, C. W., Kim, W. H., Sohn, I. B., and Lee, H., "Micromachining on the Chrome Stainless Mold Steel Using the Femtosecond Laser," Advanced Science Letters, Vol. 4, No. 8-10, pp. 3113-3118, 2011.
16. Mannion, P. T., Magee, J., Coyne, E., O'Connor, G. M., and Glynn, T. J., "The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air," Applied Surface Science, Vol. 233, No. 1-4, pp. 275-287, 2004.
17. Birnbaum, M., "Semiconductor Surface Damage Produced by Ruby Lasers," Journal of Applied Physics, Vol. 36, No. 11, pp. 3688-3689, 1965.
18. Lenzner, M., Krüger, J., Kautek, W., and Krausz, F., "Incubation of laser ablation in fused silica with 5-fs pulses," Applied Physics A: Materials Science & Processing, Vol. 69, No. 4, pp. 465-466, 1999.
19. Ashkenasi, D., Lorenz, M., Stoian, R., and Rosenfeld, A., "Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation," Applied Surface Science, Vol. 150, No. 1-4, pp. 101-106, 1999.