Selective ablation with UV lasers of a-Si:H thin film solar cells in direct scribing configuration

Applied Surface Science

Volumn 257, Issue 12, 2011, Pages 5230-5236

  Lauzurica, S ^a   Garcia Ballesteros J J ^a   Colina, M ^a   Sanchez Aniorte I ^a   Molpeceres, C ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

a Si:H; Laser scribing; Selective ablation

Indexed keywords

ABLATION; AMORPHOUS SILICON; FILM PREPARATION; HEAT AFFECTED ZONE; NANOSTRUCTURED MATERIALS; PICOSECOND LASERS; SILICON ALLOYS; SILICON SOLAR CELLS; SOLAR CELLS; SUBSTRATES; THIN FILM SOLAR CELLS; THIN FILMS; ULTRAVIOLET LASERS;

A-SI:H; CRYSTALLINE FRACTIONS; ELECTRICAL MEASUREMENT; LASER SCRIBING; MULTILAYER STRUCTURES; SELECTIVE ABLATIONS; SILICON THIN-FILM SOLAR CELLS; TRANSPARENT SUBSTRATE;

LASER MATERIALS PROCESSING;

EID: 79952315836     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.09.088     Document Type: Conference Paper

References (11)

1. W. Shinohara, M. Shima, S. Taira, K. Uchihashi, and A. Terakawa Applications of laser patterning to fabricate innovative thin film silicon solar cells Proc. SPIE 6107 2006 pp. 61070J1-61070J18
2. B. Rech, and H. Wagner Potential of amorphous silicon for solar cells Appl. Phys. A 69 1999 155 167
3. S. Golay, J. Meier, S. Dubail, S. Fay, U. Kroll, and ShahF A. First pin/pin micromorph modules by laser patterning Proceedings of the 16th EU Photovoltaic Solar Energy Conference Glasgow 2000
4. S.R. Praschek, W. Riedl, H. Hoermann, and H.G. Goslowsky Laser patterning of a-Si solar modules with transparent conducting zinc oxide back electrodes. Photovoltaic specialists' conference Conference Record of the Twenty Second IEEE, 2 1991 5 1289
5. H.J. Booth, Recent applications of pulsed lasers in advanced materials processing, Thin Solid Films (2004), 453-454, pp.s 450-457.
6. C. Molpeceres, S. Lauzurica, J.L. Ocana, J.J. Gandia, L. Urbina, and J. Carabe Microprocessing of ITO and a-Si thin films using ns laser sources J. Micromech. Microeng. 15 2005 1271 1278 (Pubitemid 40673112)
7. C. Molpeceres, S. Lauzurica, J.J. García-Ballesteros, M. Morales, G. Guadaño, J.L. Ocaña, S. Fernández, J.J. Gandía, F. Villar, O. Nos, and J. Bertomeu Selective ablation of photovoltaic materials with UV laser sources for monolithic interconnection of devices based on a-Si:H Mater. Sci. Eng. B 159-160 2009 18 22
8. J.M. Liu Simple technique for measurements of pulse Gaussian-beam spot sizes Opt. Lett. 7 1982 196
9. S. Preuss, A. Demchuk, and M. Stuke Sub-picosecond UV laser ablation of metals Appl. Phys. A 61 1995 33 37
10. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A Tünnermann Femtosecond, picosecond and nanosecond laser ablation of solids Appl. Phys. A 63 1996 109 115
11. M. Colina, C. Molpeceres, M. Holgado, J. Gandia, O. Nos, and J.L. Ocaña Study of the refractive index change in a-Si:H thin films patterned by 532 nm laser radiation for photovoltaic applications Thin Solid Films 2010 doi:10.1016/j.tsf.2010.04.016.