High-speed preparation and dielectric properties of BaTi 4O 9 film by laser chemical vapor deposition

Journal of Materials Science: Materials in Electronics

Volumn 23, Issue 4, 2012, Pages 897-900

  Guo, Dongyun ^a,b   Goto, Takashi ^b   Wang, Chuanbin ^a   Shen, Qiang ^a   Zhang, Lianmeng ^a  

^a WUHAN UNIVERSITY OF TECHNOLOGY   (China)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COLUMNAR MICROSTRUCTURES; HIGH-SPEED; LASER CHEMICAL VAPOR DEPOSITION; RANDOM ORIENTATIONS;

BARIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; DIELECTRIC PROPERTIES; MICROSTRUCTURE; VAPORS;

FILM PREPARATION;

EID: 84861885790     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-011-0517-4     Document Type: Article

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