High-speed deposition of zirconia films by laser-induced plasma CVD

Solid State Ionics

Volumn 172, Issue 1-4 SPEC. ISS., 2004, Pages 225-229

  Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Columnar structure; CVD; Deposition rate; Laser CVD; Plasma CVD; Yttria stabilized zirconia

Indexed keywords

DEPOSITION; INORGANIC COATINGS; LASER APPLICATIONS; PLASMA DIAGNOSTICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SPRAYING; THERMOANALYSIS; THIN FILMS;

COLUMNAR STRUCTURE; DEPOSITION RATE; LASER CVD; THERMAL BARRIERS; YTTRIA-STABILIZED ZIRCONIA (YSZ);

ZIRCONIA;

EID: 7544234107     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssi.2004.02.034     Document Type: Conference Paper

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