Acceptor-like deep level defects in ion-implanted ZnO

Applied Physics Letters

Volumn 100, Issue 21, 2012, Pages

  Vines, L ^a   Wong Leung, J ^b   Jagadish, C ^b   Quemener, V ^a   Monakhov, E V ^a   Svensson, B G ^a  

^a UNIVERSITY OF OSLO   (Norway)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE VOLTAGE; DEEP LEVEL; DEEP-LEVEL DEFECTS; DEFECT EVOLUTION; DOSE-DEPENDENT; ENERGY POSITION; IMPLANTATION DEPTH; INTRINSIC DEFECTS; ION DOSE; RE-DISTRIBUTION; ROOM TEMPERATURE; TRANSIENT SPECTROSCOPY; ZNO;

DEEP LEVEL TRANSIENT SPECTROSCOPY; IONS; ZINC OXIDE;

DEFECTS;

EID: 84861807037     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4720514     Document Type: Article

References (24)

1. F. D. Auret, S. A. Goodman, M. Hayes, M. J. Legodi, H. A. van Laarhoven, and D. C. Look, Appl. Phys. Lett. 79, 3074 (2001). 10.1063/1.1415050
2. M. Hayes, F. D. Auret, P. J. Janse van Rensburg, J. M. Nel, W. Wesch, and E. Wendler, Phys. Status Solidi B 244, 1544 (2007). 10.1002/pssb.200675135
3. M. Hayes, F. D. Auret, P. J. Janse van Rensburg, J. M. Nel, W. Wesch, and E. Wendler, Nucl. Instrum. Methods Phys. Res. B 257, 311 (2007). 10.1016/j.nimb.2007.01.033
4. Z.-Q. Fang, B. Claflin, D. C. Look, and G. C. Farlow, J. Appl. Phys. 101, 086106 (2007). 10.1063/1.2719003
5. V. Quemener, L. Vines, E. V. Monakhov, and B. G. Svensson, Appl. Phys. Lett. 99, 112112 (2011). 10.1063/1.3638470
6. L. J Brillson and Y. Lu, J. Appl. Phys. 605, 121301 (2011). 10.1063/1.3581173
7. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
8. B. G. Svensson, K.-H. Rydén, and B. M. S. Lewerentz, J. Appl. Phys. 66, 1699 (1989). 10.1063/1.344389
9. L. C. Kimerling, J. Appl. Phys. 45, 1839 (1974). 10.1063/1.1663500
10. A. Janotti and C. G. Van de Walle, Phys. Rev. B 75, 165202 (2007). 10.1103/PhysRevB.76.165202
11. E. Mollwo, Z. Phys. 138, 478 (1954). 10.1007/BF01340694
12. S. F. J. Cox, E. A. Davis, S. P. Cottrell, P. J. C. King, J. S. Lord, J. M. Gil, H. V. Alberto, R. C. Vilao, J. Piroto Duarte, N. Ayres de Campos, A. Weidinger, R. L. Lichti, and S. J. C. Irvine, Phys. Rev. Lett. 86, 2601 (2001). 10.1103/PhysRevLett.86.2601
13. D. G. Thomas and J. J. Lander, J. Chem. Phys. 25, 1136 (1956). 10.1063/1.1743165
14. N. H. Nickel and K. Brendel, Phys. Rev. B 68, 193303 (2003). 10.1103/PhysRevB.68.193303
15. K. M. Johansen, J. S. Christensen, E. V. Monakhov, A. Yu. Kuznetsov, and B. G. Svensson, Appl. Phys. Lett. 93, 152109 (2008). 10.1063/1.3001605
16. E. V. Monakhov, J. S. Christensen, K. Maknys, B. G. Svensson, and A. Y. Kuznetsov, Appl. Phys. Lett. 87, 191910 (2005). 10.1063/1.2128059
17. F. D. Auret, S. A. Goodman, M. J. Legodi, W. E. Meyer, and D. C. Look, Appl. Phys. Lett. 80, 1340 (2002). 10.1063/1.1452781
18. T. Frank, G. Pensl, R. Tena-Zaera, J. Zúiga-Pérez, C. Matez-Tomás, V. Muoz-Sanjosé, T. Ohshima, H. Itoh, D. Hofmann, D. Pfisterer, J. Sann, and B. Meyer, Appl. Phys A 88, 141 (2007). 10.1007/s00339-007-3963-3
19. E. V. Monakhov, J. Wong-Leung, A. Yu. Kuznetsov, C. Jagadish, and B. G. Svensson, Phys. Rev. B 65, 245201 (2002). 10.1103/PhysRevB.65.245201
20. R. E. Williford, R. Devanathan, and W. J. Weber, Nucl. Instrum. Methods Phys. Res. B 141, 94 (1998). 10.1016/S0168-583X(98)00066-4
21. B. G. Svensson, C. Jagadish, A. Hallén, and J. Lalita, Phys. Rev. B 55, 10498 (1997). 10.1103/PhysRevB.55.10498
22. Zinc Oxide Bulk, Thin films and Nanostructures, edited by, C. Jagadish, and, S. J. Pearton, (Elsevier, Oxford, 2006).
23. P. Lèvègue, H. Kortegaard Nielsen, P. Pellegrino, A. Hallèn, B. G. Svensson, A. Yu. Kuznetsov, J. Wong-Leung, C. Jagadish, and V. Privitera, J. Appl. Phys. 93, 871 (2003). 10.1063/1.1528304
24. F. A. Selim, M. H. Weber, D. Solodovnikov, and K. G. Lynn, Phys. Rev. Lett. 99, 085502 (2007). 10.1103/PhysRevLett.99.085502