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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 30, Issue 3, 2012, Pages

Conformally coating vertically aligned carbon nanotube arrays using thermal decomposition of iron pentacarbonyl

(4) Hildreth, Owen a Cola, Baratunde a Graham, Samuel a Wong, C P a,b

a Georgia Institute of Technology (United States)

b CHINESE UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; DECOMPOSITION; METALLORGANIC CHEMICAL VAPOR DEPOSITION;

CONFORMAL COATINGS; DENSE ARRAYS; DEPOSITED COATINGS; ELECTRON BEAM EVAPORATION; FACILE METHOD; IRON PENTACARBONYLS; LINE-OF-SIGHT DEPOSITION; MEAN-FREE PATH; SPUTTER COATING; VERTICALLY ALIGNED; VERTICALLY ALIGNED CARBON NANOTUBE;

COATINGS;

EID: 84861659823 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3692724 Document Type: Article

Times cited : (4)

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