Investigation of conducting nano-structures on ta-C films made by FIB lithography

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 282, Issue , 2012, Pages 121-124

  Philipp, P ^a   Bischoff, L ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Conducting nano structures; Focused ion beam; Graphitization; Tetrahedral amorphous carbon; Van der Pauw

Indexed keywords

CARBON ATOMS; ELEVATED TEMPERATURE; FIB LITHOGRAPHY; FLUENCES; SURFACE SWELLING; TA-C FILM; TETRAHEDRAL AMORPHOUS CARBON; TETRAHEDRAL AMORPHOUS CARBON (TA-C) FILMS; VAN-DER-PAUW;

COMPUTER SIMULATION; ELECTRIC PROPERTIES; FOCUSED ION BEAMS; GRAPHITIZATION; IRRADIATION; NANOSTRUCTURES;

CONDUCTIVE FILMS;

EID: 84861601212     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2011.08.057     Document Type: Conference Paper

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