Non-equidistant scanning approach for millimetre-sized SPM measurements

Nanoscale Research Letters

Volumn 7, Issue , 2012, Pages 1-7

  Klapetek, Petr ^a   Valtr, Miroslav ^a   Buršík, Petr ^b  

^a CZECH METROLOGY INSTITUTE   (Czech Republic)

^b MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE MEASUREMENTS; AMOUNT OF INFORMATION; DATA SETS; LINESCANNING; LOCAL REFINEMENT; MEASURED DATA; PIXEL SPACING; SCANNING PROBE MICROSCOPE; THERMAL DRIFTS;

DATA PROCESSING;

ALGORITHMS;

EID: 84861469732     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-7-213     Document Type: Article

References (10)

1. Werner C, Rosielle PCJN, Steinbuch M: Design of a long stroke translation stage for AFM. International Journal of Machine Tools & Manufacture 2010, 50:183-190.
2. Manske E, Hausotte T, Mastylo R, Machleidt T, Franke KH, Jäger G: New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes. Meas Sci Technol 2007, 18(2):520.
3. Eves BJ: Design of a large measurement-volume metrological atomic force microscope (AFM). Meas Sci Technol 2009, 20(8):084003.
4. Dai G, Pohlenz F, Danzebrink HU, Xu M, Hasche K, Wilkening G: Metrological large range scanning probe microscope. Rev Sci Instruments 2004, 75(4):962-969.
5. Sturwald S, Schmitt R: Large scale atomic force microscopy for characterisation of optical surfaces and coatings. Int Journal of Precision Technology 2011, 2(2-3):136-152.
6. Klapetek P, Valtr M, Matula M: A long-range scanning probe microscope for automotive reflector optical quality inspection. Meas Sci Technol 2011, 22:094011.
7. Guibas L J S: Primitives for the manipulation of general subdivisions and the computation of Voronoi diagrams. ACM Transactions on Graphics (TOG) 1985, 4(2):74-123.
8. Rahe P, Bechstein R, Kühnle A: Vertical and lateral drift corrections of scanning probe microscopy images. J Vac Sci Technol 2010, 28:C4E31.
9. Clifford CA, Seah MP: Simplified drift characterization in scanning probe microscopes using a simple two-point method. Meas Sci Technol 2009, 20:095103.
10. Marinello F, Balcon M, Schiavuta P, Carmignato S, Savio E: Thermal drift study on different commercial scanning probe microscopes during the initial warming-up phase. Meas Sci Technol 2011, 22:094016.