Plasma-based chemical modification of epitaxial graphene

Materials Science Forum

Volumn 717-720, Issue , 2012, Pages 657-660

  Walton, S G ^a   Hernandez S C ^a,b   Baraket, M ^a,b   Wheeler, V D ^a,c   Nyakiti, L O ^a,c   Myers Ward, R L ^a   Eddy, C R ^a   Gaskill, D K ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b NRC NRL   (United States)

^c ASEE NRL   (United States)

Author keywords

Epitaxial graphene; Functionalization; Oxygen; Plasma

Indexed keywords

CHEMICAL MODIFICATION; FUNCTIONAL MATERIALS; GRAPHENE; SILICON CARBIDE;

ELECTRON-BEAM-GENERATED PLASMAS; EPITAXIAL GRAPHENE; FUNCTIONALIZATIONS; OXYGEN FUNCTIONAL GROUPS; SURFACE CHARACTERIZATION; TREATMENT PARAMETERS;

OXYGEN;

EID: 84861402648     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.717-720.657     Document Type: Conference Paper

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