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Materials Science Forum

Volumn 717-720, Issue , 2012, Pages 845-848

Investigation of Ti3SiC2 MAX phase formation onto N-type 4H-SiC

(4) Drevin Bazin, A a Barbot, J F a Cabioch, T a Beaufort, M F a

a UNIVERSITÉ DE POITIERS (France)

Author keywords

Al Ti contact; Magnetron sputtering; MAX phase; SiC

Indexed keywords

ANNEALING; BINARY ALLOYS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; SUBSTRATES;

AL-TI CONTACTS; ANNEALING TEMPERATURES; HIGH VACUUM SYSTEMS; I-V MEASUREMENTS; IN-SITU ANNEALING; INTERDIFFUSION PROCESS; MAX-PHASE; THERMAL-ANNEALING;

SILICON CARBIDE;

EID: 84861397723 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/MSF.717-720.845 Document Type: Conference Paper

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.