Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns

Applied Surface Science

Volumn 258, Issue 19, 2012, Pages 7601-7606

  Kuang, Zheng ^a   Perrie, Walter ^a   Liu, Dun ^a   Fitzsimons, Paul ^a   Edwardson, Stuart P ^a   Fearon, Eamonn ^a   Dearden, Geoff ^a   Watkins, Ken G ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

Indium tin oxide (ITO); Spatial light modulator (SLM); Ultrashort pulse laser

Indexed keywords

CONDUCTIVE FILMS; INDIUM COMPOUNDS; ITO GLASS; LASER ABLATION; LIGHT MODULATION; LIGHT MODULATORS; SUBSTRATES; TIN OXIDES; ULTRAFAST LASERS; ULTRASHORT PULSES;

FUNCTIONAL STRUCTURE; INDIUM TIN OXIDE; INDIUM TIN OXIDE THIN FILMS; MULTIPLE BEAM PATTERNS; MULTIPLE PROCESSING; PATTERNING TECHNOLOGY; SPATIAL LIGHT MODULATORS; ULTRA-SHORT PULSE LASER;

THIN FILMS;

EID: 84861342953     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.04.099     Document Type: Article

References (21)

1. M. Henry, P.M. Harrison, and J. Wendland Laser direct write of active thin-films on glass for industrial flat panel display manufacture Journal of Laser Micro/Nanoengineering 2 1 2007 49 56
2. O. Yavas, and M. Takai Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide thin films Journal of Applied Physics 85 8 1999 4207 4212
3. 4 lasers for organic light emitting diodes Synthetic Metals 138 3 2003 497 500
4. M. Chen, Y. Chen, W. Hsian, and Z. Gu Laser direct write patterning technique of indium tin oxide film Thin Solid Films 515 24 2007 8515 8518
5. H.W. Choi, D.F. Farson, J. Bovatsek, A. Arai, and D. Ashkenasi Direct-write patterning of indium-tin-oxide film by high pulse repetition frequency femtosecond laser ablation Applied Optics 46 23 2007 5792 5799
6. X. Liu, D. Du, and G. Mourou Laser ablation and micromachining with ultrashort laser pulses IEEE Journal of Quantum Electronics 33 1997 1706 1716
7. D. Ashkenasi, G. Muller, A. Rosenfeld, R. Stoian, I.V. Hertel, N.M. Bulgakova, and E.E.B. Campbell Fundamentals and advantages of ultrafast micro-structuring of transparent materials Applied Physics A 77 2003 223 228
8. Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida Variable holographic femtosecond laser processing by use of a spatial light modulator Applied Physics Letters 87 2005 031101
9. S. Hasegawa, Y. Hayasaki, and N. Nishida Holographic femtosecond laser processing with multiplexed phase Fresnel lenses Optics Letters 31 2006 1705 1707
10. Z. Kuang, W. Perrie, J. Leach, M. Sharp, S.P. Edwardson, M. Padgett, G. Dearden, and K.G. Watkins High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator Applied Surface Science 255 5 2008 2284 2289
11. Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, G. Ken, and Watkins Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring Applied Surface Science 255 13-14 2009 6582 6588
12. Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K.G. Watkins Diffractive multi-beam surface micro-processing using 10 ps laser pulses Applied Surface Science 255 22 2009 9040 9044
13. Z. Kuang, D. Liu, W. Perrie, J. Cheng, S. Shang, S.P. Edwardson, E. Fearon, G. Dearden, and K. Watkins Diffractive multi-beam ultra-fast laser micro-processing using a spatial light modulatro (invited paper) Chinese Journal of Lasers 36 12 2009 3093 3115
14. D. Liu, Z. Kuang, W. Perrie, P. Scully, A. Baum, S. Edwardson, E. Fearon, G. Dearden, and K. Watkins High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings Applied Physics B 101 4 2010 817 823
15. J.M. Liu Simple technique for measurements of pulsed Gaussian-beam spot sizes Optics Letters 7 1982 196 198
16. O. Yavas, and M. Takai Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide thin films Journal of Applied Physics 85 1999 4207 4212
17. J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z.J. Laczik, and M. Padgett Interactive approach to optical tweezers control Applied Optics 45 2006 897 903
18. J. Liesener, M. Reicherter, T. Haist, and H.J. Tiziani Multi-functional optical tweezers using computer-generated holograms Optics Communications 185 2000 77 82
19. J.E. Curtis, C.H.J. Schmitz, and J.P. Spatz Symmetry dependence of holograms for optical trapping Optics Letters 30 2005 2086 2088
20. B. Luther-Davies, A.V. Rode, N.R. Madsen, and E.G. Gamal Picosecond high-repetition-rate pulsed laser ablation of dielectrics: the effect of energy accumulation between pulses Optical Engineering 44 5 2005 051102
21. D. Ashkenasi, M. Lorenz, R. Stoian, and A. Rosenfeld Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation Applied Surface Science 150 1999 101 106