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Volumn 26, Issue , 2012, Pages 50-54

Diamond-like carbon films as piezoresistors in highly sensitive force sensors

Author keywords

a C:H; Diamond like carbon; Force sensor; Gauge factor; Piezoresistivity

Indexed keywords

A-C:H; DIAMOND-LIKE CARBON; FORCE SENSOR; GAUGE FACTORS; PIEZORESISTIVITY;

BIAS VOLTAGE; CARBON FILMS; DIAMONDS; FLOW OF GASES; GAGES; HYDROCARBONS; SENSORS;

DIAMOND LIKE CARBON FILMS;

EID: 84860867480 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2012.04.004 Document Type: Article

Times cited : (25)

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