Solvent-free surface modification by initiated chemical vapor deposition to render plasma bonding capabilities to surfaces

Microfluidics and Nanofluidics

Volumn 12, Issue 5, 2012, Pages 835-839

  Sreenivasan, Ramaswamy ^a   Bassett, Erik K ^b   Cervantes, Thomas M ^b   Hoganson, David M ^b   Vacanti, Joseph P ^b   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b MASSACHUSETTS GENERAL HOSPITAL   (United States)

Author keywords

ICVD; Plasma bonding; Solvent free; Surface modification

Indexed keywords

BURST PRESSURES; COATED SUBSTRATES; HYDROLYTIC STABILITY; ICVD; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHANNEL; OXYGEN PLASMAS; PDMS MICROFLUIDIC DEVICE; PLASMA BONDING; POLYDIMETHYLSILOXANE PDMS; PTFE MEMBRANES; ROOM TEMPERATURE; SOLVENT FREE; SOLVENT-FREE METHOD;

CHEMICAL VAPOR DEPOSITION; FLUIDIC DEVICES; SOLVENTS; SUBSTRATES; SURFACE ROUGHNESS; SURFACE TREATMENT; VAPORS;

MICROCHANNELS;

EID: 84860841538     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-011-0913-3     Document Type: Article

References (13)

1. Alentejano CR, Aoki IV (2004) Localized corrosion inhibition of 304 stainless steel in pure water by oxyanions tungstate and molybdate. Electrochimica Acta 49:2779-2785
2. Baxamusa S, Gleason K (2008) Thin polymer films with high step coverage in microtrenches by initiated CVD. Chem Vap Depos 14:313-318
3. Chen CF, Liu J, Chang CC, DeVoe DL (2009) High-pressure on-chip mechanical valves for thermoplastic microfluidic devices. Lab Chip 21:3511-3516
4. Chueh B, Huh D, Kyrtsos C, Houssin T, Futai N, Takayama S (2007) Leakage-free bonding of porous membranes into layered microfluidic array systems. Anal Chem 79:3504-3508 (Pubitemid 46717183)
5. Hoganson D, Pryor H, Bassett E, Spool I, Vacanti J (2011) Lung assist device technology with physiologic blood flow developed on a tissue engineered scaffold platform. Lab Chip 11:700-707
6. Lee J, Park C, Whitesides G (2003) Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices. Anal Chem 75:6544-6554 (Pubitemid 37493912)
7. McDonald J, Duffy D, Anderson J, Chiu D, Wu H, Schueller O, Whitesides G (2000) Fabrication of microfluidic systems in poly(dimethylsiloxane). Electrophoresis 21:27-40 (Pubitemid 30032694)
8. O'Shaughnessy W, Gao M, Gleason K (2006) Initiated chemical vapor deposition of trivinyltrimethylcyclotrisiloxane for biomaterial coatings. Langmuir 22:7021-7026 (Pubitemid 44231447)
9. O'Shaughnessy W, Murthy S, Edell D, Gleason K (2007) Stable biopassive insulation synthesized by initiated chemical vapor deposition of poly(1, 3, 5-trivinyltrimethylcyclotrisiloxane). Biomacromolecules 8:2564-2570 (Pubitemid 47316999)
10. Satyanarayana S, Karnik R, Majumdar A (2005) Stamp-and-stick room temperature bonding techniques for microdevices. Microelectromech Syst 14:392-399 (Pubitemid 40679629)
11. Sreenivasan R, Bassett E, Hoganson D, Vacanti J, Gleason K (2011) Ultra-thin, gas permeable free-standing and composite membranes for microfluidic lung assist devices. Biomaterials 32:3883-3889
12. Wu H, Huang B, Zare R (2005) Construction of microfluidic chips using polydimethylsiloxane for adhesive bonding. Lab Chip 5:1393-1398 (Pubitemid 41785264)
13. Yang X, Yang JM, Tai YC, Ho CM (1999) Micromachined membrane particle filters. Sens Actuators A Phys 73:184-191