Integrated countercurrent reverse osmosis cascades for hydrogen peroxide ultrapurification

Computers and Chemical Engineering

Volumn 41, Issue , 2012, Pages 67-76

  Abejon R ^a   Garea, A ^a   Irabien, A ^a  

^a UNIVERSITY OF CANTABRIA   (Spain)

Author keywords

Hydrogen peroxide; Membrane cascades; Reverse osmosis; Ultrapurification; Wet electronic chemicals

Indexed keywords

ANNUAL PRODUCTION; COUNTER CURRENT; ECONOMIC PROFIT; ELECTRONIC CHEMICALS; ELECTRONIC GRADE; EMERGING APPLICATIONS; HIGH PURITY; IMPURITIES CONTENTS; INDUSTRIAL PRODUCTION; INDUSTRIAL SECTOR; INDUSTRY ASSOCIATION; MEMBRANE PROCESS; MICRO-ELECTRONIC DEVICES; OBJECTIVE FUNCTIONS; OPERATING EXPENSE; OPTIMIZATION STRATEGY; SEMICONDUCTOR EQUIPMENT AND MATERIALS INTERNATIONALS; SEMICONDUCTOR INDUSTRY; SEPARATION TECHNIQUES; ULTRA-PURIFICATION;

HYDROGEN PEROXIDE; INDUSTRY; INTEGRATION; MICROELECTRONICS; PROFITABILITY; REVERSE OSMOSIS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICES;

INDUSTRIAL CHEMICALS;

EID: 84860634133     PISSN: 00981354     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.compchemeng.2012.02.017     Document Type: Article

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