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Volumn 23, Issue 20, 2012, Pages
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Quantification of electronphonon scattering for determination of temperature variations at high spatial resolution in the transmission electron microscope
a,b
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFFUSE SCATTERING;
ELECTRON PHONON;
ELECTRON PHONON SCATTERING;
HIGH SPATIAL RESOLUTION;
NANO SCALE;
SAMPLE THICKNESS;
SINGLE-CRYSTAL SI;
SPATIAL RESOLUTION;
TEMPERATURE CHANGES;
TEMPERATURE SENSITIVITY;
TEMPERATURE VARIATION;
TRANSMISSION ELECTRON MICROSCOPE;
TRANSMISSION ELECTRON MICROSCOPY (TEM);
ANGULAR DISTRIBUTION;
GERMANIUM;
SILICON;
SILICON WAFERS;
TEMPERATURE DISTRIBUTION;
TEMPERATURE MEASUREMENT;
TRANSMISSION ELECTRON MICROSCOPY;
SCATTERING;
ALGORITHM;
ARTICLE;
EQUIPMENT;
EQUIPMENT DESIGN;
IMAGE ENHANCEMENT;
INSTRUMENTATION;
METHODOLOGY;
PHONON;
RADIATION SCATTERING;
TEMPERATURE;
THERMOGRAPHY;
TRANSMISSION ELECTRON MICROSCOPY;
ALGORITHMS;
EQUIPMENT DESIGN;
EQUIPMENT FAILURE ANALYSIS;
IMAGE ENHANCEMENT;
MICROSCOPY, ELECTRON, TRANSMISSION;
PHONONS;
SCATTERING, RADIATION;
TEMPERATURE;
THERMOGRAPHY;
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EID: 84860535609
PISSN: 09574484
EISSN: 13616528
Source Type: Journal
DOI: 10.1088/0957-4484/23/20/205705 Document Type: Article |
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Times cited : (14)
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References (13)
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