Two-port static coated micro gas chromatography column with an embedded thermal conductivity detector

IEEE Sensors Journal

Volumn 12, Issue 6, 2012, Pages 1893-1900

  Narayanan, Shree ^a   Alfeeli, Bassam ^a,b   Agah, Masoud ^a  

^a State University   (United States)

^b KUWAIT INSTITUTE FOR SCIENTIFIC RESEARCH   (Kuwait)

Author keywords

Micro gas chromatography; monolithic microelectromechanical systems integration; separation column; thermal conductivity detector

Indexed keywords

COLUMN TEMPERATURE; CONDUCTIVITY DETECTORS; ETCH DEPTH; FLAME IONIZATION DETECTORS; MICRO-GAS CHROMATOGRAPHY; MICROFABRICATED; MONOLITHIC DEVICES; MULTICOMPONENTS; ON CHIPS; ON-CHIP TEMPERATURE; PROCESS FLOWS; PYREX WAFERS; RIE LAG; SEPARATION AND IDENTIFICATION; SEPARATION COLUMN; SILICON SUBSTRATES; SINGLE-CHIP DESIGNS; TEMPERATURE-PROGRAMMING; THERMAL CONDUCTIVITY DETECTORS;

C (PROGRAMMING LANGUAGE); DETECTORS; ELECTROMECHANICAL DEVICES; GAS CHROMATOGRAPHY; MEMS; SILICON WAFERS;

THERMAL CONDUCTIVITY;

EID: 84860524311     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2180017     Document Type: Article

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