Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

Japanese Journal of Applied Physics

Volumn 51, Issue 4 PART 1, 2012, Pages

  Maeyoshi, Yuta ^a   Takano, Katsuyoshi ^a   Asano, Atsushi ^a   Marui, Hiromi ^a   Omichi, Masaaki ^a   Satoh, Takahiro ^b   Kamiya, Tomihiro ^b   Ishii, Yasuyuki ^b   Ohkubo, Takeru ^b   Koka, Masashi ^b   Kada, Wataru ^b   Sugimoto, Masaki ^b   Nishikawa, Hiroyuki ^c   Saeki, Akinori ^a   Seki, Shu ^a  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

^c SHIBAURA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CROSS LINKING AGENTS; CROSSLINKING REACTION; FLUENCES; MICROMETER SCALE; PROTON BEAM WRITING; STRUCTURE SIZES;

ASPECT RATIO; CROSSLINKING; POLYMER FILMS;

ION BEAM LITHOGRAPHY;

EID: 84860436176     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.51.045201     Document Type: Article

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