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Volumn 105, Issue 3, 2011, Pages 575-582
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A precise and wide-dynamic-range displacement-measuring homodyne quadrature laser interferometer
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Author keywords
[No Author keywords available]
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Indexed keywords
DC OFFSETS;
DYNAMIC RANGE;
HIGH FREQUENCY HF;
HOMODYNES;
LASER INTERFEROMETER;
LASER-INDUCED ULTRASOUND;
LEAST-SQUARES FITTINGS;
LISSAJOUS CURVES;
NANOMETRICS;
WIDE DYNAMIC RANGE;
CURVE FITTING;
DATA PROCESSING;
LASER INTERFEROMETRY;
MICHELSON INTERFEROMETERS;
THREE DIMENSIONAL COMPUTER GRAPHICS;
ULTRASONIC APPLICATIONS;
DISPLACEMENT MEASUREMENT;
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EID: 84859708633
PISSN: 09462171
EISSN: None
Source Type: Journal
DOI: 10.1007/s00340-011-4512-5 Document Type: Conference Paper |
Times cited : (49)
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References (23)
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