메뉴 건너뛰기




Volumn 17, Issue 25, 2009, Pages 23299-23308

A passive method to compensate nonlinearity in a homodyne interferometer

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL CONSTANTS; OPTICS;

EID: 72049128925     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.023299     Document Type: Article
Times cited : (55)

References (9)
  • 1
    • 0037390706 scopus 로고    scopus 로고
    • Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope
    • I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, "Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope," Meas. Sci. Technol. 14(4), 463-471 (2003).
    • (2003) Meas. Sci. Technol. , vol.14 , Issue.4 , pp. 463-471
    • Misumi, I.1    Gonda, S.2    Kurosawa, T.3    Takamasu, K.4
  • 2
    • 0019621824 scopus 로고
    • Determination and correction of quadrature fringe measurement errors in interferometers
    • P. L. M. Heydemann, "Determination and correction of quadrature fringe measurement errors in interferometers," Appl. Opt. 20(19), 3382-3384 (1981).
    • (1981) Appl. Opt. , vol.20 , Issue.19 , pp. 3382-3384
    • Heydemann, P.L.M.1
  • 3
    • 0030128521 scopus 로고    scopus 로고
    • Correction of nonlinearity in one-frequency optical interferometry
    • C.-M. Wu, C.-S. Su, and G.-S. Peng, "Correction of nonlinearity in one-frequency optical interferometry," Meas. Sci. Technol. 7(4), 520-524 (1996).
    • (1996) Meas. Sci. Technol. , vol.7 , Issue.4 , pp. 520-524
    • Wu, C.-M.1    Su, C.-S.2    Peng, G.-S.3
  • 4
    • 0035477816 scopus 로고    scopus 로고
    • The dynamic compensation of nonlinearity in a homodyne laser interferometer
    • T. B. Eom, J. Y. Kim, and K. Jeong, "The dynamic compensation of nonlinearity in a homodyne laser interferometer," Meas. Sci. Technol. 12(10), 1734-1738 (2001).
    • (2001) Meas. Sci. Technol. , vol.12 , Issue.10 , pp. 1734-1738
    • Eom, T.B.1    Kim, J.Y.2    Jeong, K.3
  • 5
    • 63849112775 scopus 로고    scopus 로고
    • A digital signal processing module for real-time compensation of nonlinearity in a homodyne interferometer using a field-programmable gate array
    • 017003.1-017003.5
    • J.-A. Kim, J. W. Kim, C.-S. Kang, T. B. Eom and J. Ahn, "A digital signal processing module for real-time compensation of nonlinearity in a homodyne interferometer using a field-programmable gate array," Meas. Sci. Technol 20(1), 017003.1-017003.5 (2009).
    • (2009) Meas. Sci. Technol , vol.20 , Issue.1
    • Kim, J.-A.1    Kim, J.W.2    Kang, C.-S.3    Eom, T.B.4    Ahn, J.5
  • 6
    • 20844434362 scopus 로고    scopus 로고
    • Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system
    • T. Keem, S. Gonda, I. Misumi, Q. Huang, and T. Kurosawa, "Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system," Appl. Opt. 44(17), 3492-3498 (2005).
    • (2005) Appl. Opt. , vol.44 , Issue.17 , pp. 3492-3498
    • Keem, T.1    Gonda, S.2    Misumi, I.3    Huang, Q.4    Kurosawa, T.5
  • 7
    • 0037344727 scopus 로고    scopus 로고
    • A neural network approach to correcting nonlinearity in optical interferometers
    • Z. Li, K. Herrmann, and F. Pohlenz, "A neural network approach to correcting nonlinearity in optical interferometers," Meas. Sci. Technol. 14(3), 376-381 (2003).
    • (2003) Meas. Sci. Technol. , vol.14 , Issue.3 , pp. 376-381
    • Li, Z.1    Herrmann, K.2    Pohlenz, F.3
  • 8
    • 0037094458 scopus 로고    scopus 로고
    • Polarization compensation: A passive approach to a reducing heterodyne interferometer nonlinearity
    • O. P. Lay, and S. Dubovitsky, "Polarization compensation: a passive approach to a reducing heterodyne interferometer nonlinearity," Opt. Lett. 27(10), 797-799 (2002).
    • (2002) Opt. Lett. , vol.27 , Issue.10 , pp. 797-799
    • Lay, O.P.1    Dubovitsky, S.2
  • 9
    • 1342329504 scopus 로고    scopus 로고
    • Improving the erformance of interferometers in metrological scanning probe microscopes
    • G. Dai F. Pohlenz, H.-U. Danzebrink, K. Hasche, and G. Wilkening, "Improving the erformance of interferometers in metrological scanning probe microscopes," Meas. Sci. Technol. 15(2), 444-450 (2004).
    • (2004) Meas. Sci. Technol. , vol.15 , Issue.2 , pp. 444-450
    • Dai Pohlenz F, G.1    Danzebrink, H.-U.2    Hasche, K.3    Wilkening, G.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.