Focused ion beam milling of microchannels in lithium niobate

Biomicrofluidics

Volumn 6, Issue 1, 2012, Pages

  Sridhar, Manoj ^a   Maurya, Devendra K ^a,b   Friend, James R ^a,b,c   Yeo, Leslie Y ^a,b,c  

^a MELBOURNE CENTRE FOR NANOFABRICATION   (Australia)

^b MONASH UNIVERSITY   (Australia)

^c RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAMS; IONS; LITHIUM; MICROCHANNELS; MILLING (MACHINING); NIOBIUM COMPOUNDS;

CROSS SECTIONAL PROFILES; EXPERIMENTAL MATERIALS; FOCUSED ION BEAM MILLING; HIGH ASPECT RATIO; ION BEAM CURRENTS; LOW ASPECT RATIO; MATERIAL REMOVAL RATE; STOPPING AND RANGE OF IONS IN MATTERS;

ASPECT RATIO;

EID: 84859367115     PISSN: 19321058     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3673260     Document Type: Article

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