Circular multilayer zone plate for high-energy x-ray nano-imaging

Review of Scientific Instruments

Volumn 83, Issue 1, 2012, Pages

  Koyama, Takahisa ^a,c   Takano, Hidekazu ^a   Konishi, Shigeki ^a   Tsuji, Takuya ^a,c   Takenaka, Hisataka ^b   Ichimaru, Satoshi ^b   Ohchi, Tadayuki ^b   Kagoshima, Yasushi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

^c JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DC MAGNETRON SPUTTERING; DIFFRACTION INTEGRAL; DIFFRACTION LIMITED; FOCUSING PERFORMANCE; FRESNEL ZONES; HIGH ENERGY X RAY; LINE SPREAD FUNCTIONS; LINE-AND-SPACE PATTERNS; NANO-IMAGING; SI LAYER; TOMOGRAPHIC RECONSTRUCTION; TRANSMISSION MICROSCOPY; WIRE CORES; ZONE PLATES;

DIFFRACTION; OPTICAL TRANSFER FUNCTION;

MULTILAYERS;

EID: 84859171476     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3676165     Document Type: Review

References (20)

1. J. Kirz, J. Opt. Soc. Am. 64, 301 (1974). 10.1364/JOSA.64.000301
2. D. Rudolph, B. Niemann, and G. Schmahl, Proc. SPIE 316, 103 (1981).
3. K. Saitoh, K. Inagawa, K. Kohra, C. Hayashi, A. Iida, and N. Kato, Jpn. J. Appl. Phys. 27, L2131 (1988). 10.1143/JJAP.27.L2131
4. N. Kamijo, S. Tamura, Y. Suzuki, K. Handa, A. Takeuchi, S. Yamamoto, M. Ando, K. Ohsumi, and H. Kihara, Rev. Sci. Instrum. 68, 14 (1997). 10.1063/1.1147851
5. B. Kaulich, Proc. SPIE 3449, 108 (1998). 10.1117/12.330336
6. S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, H. Takano, and K. Uesugi, AIP Conf. Proc. 716, 144 (2004). 10.1063/1.1796602
7. S. Tamura, M. Yasumoto, N. Kamijo, K. Uesugi, A. Takeuchi, Y. Terada, and Y. Suzuki, J. Phys.: Conf. Ser. 186, 012075 (2009). 10.1088/1742-6596/186/1/ 012075
8. T. Koyama, S. Ichimaru, T. Tsuji, H. Takano, Y. Kagoshima, T. Ohchi, and H. Takenaka, Appl. Phys. Express 1, 117003 (2008). 10.1143/APEX.1.117003
9. T. Liese, V. Radisch, I. Knorr, M. Reese, P. Gromann, K. Mann, and H.-U. Krebs, Appl. Surf. Sci. 257, 5138 (2011). 10.1016/j.apsusc.2010.10.076
10. M. Mayer, C. Grevent, A. Szghalmi, M. Weigand, S. Hehbein, and M. Knez, presented at 10th International Conference on X-ray Microscopy 2010, Chicago, USA, August 15-20.
11. H. Takenaka, T. Kawamura, Y. Ishii, and S. Asagiri, J. Appl. Phys. 78, 5227 (1995). 10.1063/1.359698
12. J. Maser and G. Schmahl, Opt. Commun. 89, 355 (1992). 10.1016/0030-4018(92)90182-Q
13. G. Schneider, Appl. Phys. Lett. 71, 2242 (1997). 10.1063/1.120069
14. T. Koyama, H. Takenaka, S. Ichimaru, T. Ohchi, T. Tsuji, H. Takano, and Y. Kagoshima, AIP Conf. Proc. 1365, 24 (2011). 10.1063/1.3625296
15. Y. Tsusaka, K. Yokoyama, S. Takeda, K. Takai, Y. Kagoshima, and J. Matsui, Nucl. Instrum. Methods Phys. Res. A 467-468, 670 (2001). 10.1016/S0168-9002(01)00440-5
16. Y. Suzuki, A. Takeuchi, H. Takano, and H. Takenaka, Jpn. J. Appl. Phys. 44, 1994 (2005). 10.1143/JJAP.44.1994
17. H. Takano, T. Hashimoto, T. Tsuji, T. Koyama, Y. Tsusaka, and Y. Kagoshima, Rev. Sci. Instrum. 81, 073702 (2010). 10.1063/1.3456447
18. H. Takano, T. Tsuji, T. Hashimoto, T. Koyama, Y. Tsusaka, and Y. Kagoshima, Appl. Phys. Express 3, 076702 (2010). 10.1143/APEX.3.076702
19. M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1986), Vol. 414-418.
20. J. Kirz and H. Rarback, Rev. Sci. Instrum. 56, 1 (1985). 10.1063/1.1138464