Application of the Taguchi approach of the design of experiments for determination constructional and working parameters of the linear Venetian blind microdroplet filter

Vacuum

Volumn 86, Issue 9, 2012, Pages 1248-1254

  Zavaleyev, V ^a   Walkowicz, J ^a  

^a KOSZALIN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Angular distribution of microdroplets; Cleaning efficiency; Electrostatic filter; Ion current intensity; Taguchi method

Indexed keywords

CLEANING EFFICIENCY; DC DISCHARGES; FILTERING EFFICIENCY; GAS PRESSURES; HIGH-CURRENT; ION CURRENT INTENSITY; ION CURRENTS; MICRO DROPLETS; OPTIMAL CONDITIONS; TAGUCHI; TAGUCHI APPROACH; TILT ANGLE; TITANIUM CATHODE; VENETIAN BLIND; WORKING PARAMETERS;

ANGULAR DISTRIBUTION; DESIGN OF EXPERIMENTS; ELECTROSTATICS; TAGUCHI METHODS; TITANIUM;

EFFICIENCY;

EID: 84859002991     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.11.006     Document Type: Conference Paper

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