Properties of super-hard carbon films deposited by pulsed arc process

Vacuum

Volumn 85, Issue 4, 2010, Pages 506-509

  Grimm, Werner ^a   Weihnacht, Volker ^b  

^a INOVAP Vakuum und Plasmatechnik GmbH Dresden   (Germany)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

DLC; Pulsed dc arc; Vacuum arc

Indexed keywords

DLC; EVAPORATION PROCESS; FRICTION AND WEAR PROPERTIES; HARDNESS MEASUREMENT; PROCESS CONDITION; PULSED ARC; PULSED ARC DISCHARGE; PULSED ARC PROCESS; PULSED DC ARCS; PULSED VACUUM ARC; SLIDING TEST; TA-C FILM; VACUUM ARC;

MACHINERY; NANOINDENTATION; RAMAN SPECTROSCOPY; STRUCTURAL ANALYSIS; VACUUM; VACUUM APPLICATIONS; VACUUM TECHNOLOGY;

CARBON FILMS;

EID: 78649636968     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2010.01.022     Document Type: Conference Paper

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