Recent advances in surface processing with the filtered DC vacuum-arc plasma

Vacuum

Volumn 78, Issue 2-4, 2005, Pages 445-449

  Ryabchikov, A I ^a   Ryabchikov, I A ^a   Stepanov, I B ^a   Sivin, D O ^a  

^a TOMSK POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

DC vacuum arc; Metal plasma cleaned from macroparticles

Indexed keywords

ADHESION; DEPOSITION; FRICTION; HARDNESS; PLASMAS; SPUTTERING; SURFACE ROUGHNESS; VACUUM TECHNOLOGY; WEAR RESISTANCE;

ADHESION STRENGTH; DC VACUUM ARC; METAL PLASMA CLEANED FROM MACROPARTICLES; PLASMA FLOW EXPANSION;

SURFACE TREATMENT;

EID: 18444379954     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.066     Document Type: Conference Paper

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