Optimization of hybrid PVD process of TiAlN coatings by Taguchi method

Applied Surface Science

Volumn 255, Issue 5 PART 1, 2008, Pages 1865-1869

  Yu, Donghai ^a   Wang, Chengyong ^a   Cheng, Xiaoling ^a   Zhang, Fenglin ^a  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

End mill; Hybrid PVD; Taguchi method; TiAlN coating

Indexed keywords

ALUMINUM COMPOUNDS; BIAS VOLTAGE; COATINGS; ION IMPLANTATION; MICROHARDNESS; MILLING (MACHINING); PHYSICAL VAPOR DEPOSITION; TAGUCHI METHODS;

COLUMNAR MICROSTRUCTURES; END MILL; HOLLOW CATHODE DISCHARGE ION PLATINGS; HYBRID PVD; MEDIUM-FREQUENCY MAGNETRON SPUTTERING; PREFERRED ORIENTATIONS; SUBSTRATE BIAS VOLTAGES; TIALN COATINGS;

TITANIUM COMPOUNDS;

EID: 56949094283     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.06.204     Document Type: Article

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