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Volumn 5, Issue 3, 2012, Pages

Nanoporosity induced by ion implantation in germanium thin films grown by molecular beam epitaxy

b CNR IMM (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COLUMNAR STRUCTURES; FILM PROPERTIES; FLUENCES; FUTURE APPLICATIONS; GE THIN FILMS; NANO-POROUS; NANOPOROSITY; POLYCRYSTALLINE; VOID NUCLEATION;

AMORPHOUS FILMS; AMORPHOUS MATERIALS; CRYSTALS; EPITAXIAL GROWTH; ION IMPLANTATION; MOLECULAR BEAM EPITAXY; TECHNOLOGY TRANSFER; THIN FILMS;

GERMANIUM;

EID: 84858665802 PISSN: 18820778 EISSN: 18820786 Source Type: Journal
DOI: 10.1143/APEX.5.035201 Document Type: Article

Times cited : (28)

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