Procedures and properties for a direct nano-micro integration of metal and semiconductor nanowires on Si chips

Journal of Nanotechnology

Volumn , Issue , 2012, Pages

  Gedamu, Dawit ^a   Paulowicz, Ingo ^a   Jebril, Seid ^a   Kumar Mishra, Yogendra ^a   Adelung, Rainer ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC DEVICE; MESOSTRUCTURES; NANO SCALE; NANO-MESO STRUCTURES; NANO-MICRO STRUCTURE; SEMICONDUCTOR NANOSTRUCTURES; SEMICONDUCTOR NANOWIRE; SI CHIPS; SILICON CHIP; VAPOR-LIQUID-SOLID; WAFER-LEVEL FABRICATION;

ELECTRIC FIELD EFFECTS; ELECTRIC PROPERTIES; FIELD EFFECT TRANSISTORS; INTEGRATION; NANOWIRES; SILICON; SILICON WAFERS; VAPORS;

NANOSENSORS;

EID: 84858304551     PISSN: 16879503     EISSN: 16879511     Source Type: Journal    
DOI: 10.1155/2012/325732     Document Type: Article

References (34)

1. Lieber C. M., Wang Z. L., Functional nanowires MRS Bulletin 2007 32 99 108
2. Hu J., Odom T. W., Lieber C. M., Chemistry and physics in one dimension: synthesis and properties of nanowires and nanotubes Accounts of Chemical Research 1999 32 5 435 445
3. Schlottig F., Textor M., Spencer N. D., Sekinger K., Schnaut U., Paulet J. F., Characterization of nanoscale metal structures obtained by template synthesis Fresenius' Journal of Analytical Chemistry 1998 361 6-7 684 686 (Pubitemid 128790651)
4. Rabin O., Herz P. R., Lin Y. M., Akinwande A. I., Cronin S. B., Dresselhaus M. S., Formation of thick porous anodic alumina films and nanowire arrays on silicon wafers and glass Advanced Functional Materials 2003 13 8 631 638
5. Shi L., Pei C., Li Q., Fabrication of ordered single-crystalline CuInSe 2 nanowire arrays CrystEngComm 2010 12 11 3882 3885
6. Holmes J. D., Johnston K. P., Doty R. C., Korgel B. A., Control of thickness and orientation of solution-grown silicon nanowires Science 2000 287 5457 1471 1473 (Pubitemid 30127137)
7. Greyson E. C., Babayan Y., Odom T. W., Directed growth of ordered arrays of small-diameter ZnO nanowires Advanced Materials 2004 16 15 1348 1352
8. Ng H. T., Han J., Yamada T., Nguyen P., Chen Y. P., Meyyappan M., Single crystal nanowire vertical surround-gate field-effect transistor Nano Letters 2004 4 7 1247 1252 (Pubitemid 39092167)
9. Lee C. Y., Tseng T. Y., Li S. Y., Lin P., Growth of zinc oxide nanowires on silicon (100) Tamkang Journal of Science and Engineering 2003 6 2 127 132
10. Fan H. J., Werner P., Zacharias M., Semiconductor nanowires: from self-organization to patterned growth Small 2006 2 6 700 717 (Pubitemid 43745137)
11. Jebril S., Kuhlmann H., Mller S., Ronning C., Kienle L., Duppel V., Mishra Y. K., Adelung R., Epitactically interpenetrated high quality ZnO nanostructured junctions on microchips grown by the vapor-liquid-solid method Crystal Growth and Design 2010 10 7 2842 2846
12. Adelung R., Cenkaktas O., Franc J., Biswas A., Kunz R., Elbahri M., Kanzow J., Schrmann U., Faupel F., Strain-controlled growth of nanowires within thin-film cracks Nature Materials 2004 3 6 375 379
13. Elbahri M., Rudra S. K., Wille S., Jebril S., Scharnberg M., Paretkar D., Kunz R., Rui H., Biswas A., Adelung R., Employing thin-film delamination for the formation of shadow masks for nanostructure fabrication Advanced Materials 2006 18 8 1059 1062
14. Alaca B. E., Sehitoglu H., Saif T., Guided self-assembly of metallic nanowires and channels Applied Physics Letters 2004 84 23 4669 4671
15. Wagner R. S., Ellis W. C., Vapor-liquid-solid mechanism of single crystal growth Applied Physics Letters 1964 4 5 89 90
16. Zhang Z., Wang S. J., Yu T., Wu T., Controlling the growth mechanism of ZnO nanowires by selecting catalysts Journal of Physical Chemistry C 2007 111 47 17500 17505 (Pubitemid 350247222)
17. Fan Z., Lu J. G., Zinc oxide nanostructures: synthesis and properties Journal of Nanoscience and Nanotechnology 2005 5 10 1561 1573 (Pubitemid 44651964)
18. Wang Z. L., ZnO nanowire and nanobelt platform for nanotechnology Materials Science and Engineering R 2009 64 3-4 33 71
19. Borchers C., Mller S., Stichtenoth D., Schwen D., Ronning C., Catalyst-nanostructure interaction in the growth of 1-D ZnO nanostructures Journal of Physical Chemistry B 2006 110 4 1656 1660 (Pubitemid 43235763)
20. Wang X., Song J., Wang Z. L., Nanowire and nanobelt arrays of zinc oxide from synthesis to properties and to novel devices Journal of Materials Chemistry 2007 17 8 711 720
21. Huang H., Fabrication and mechanics of nanorods Reviews on Advanced Materials Science 2006 13 1 41 46 (Pubitemid 46470462)
22. Kim D. S., Scholz R., Gxele U., Zacharias M., Gold at the root or at the tip of ZnO nanowires: a model Small 2008 4 10 1615 1619
23. Mishra Y. K., Mohapatra S., Singhal R., Avasthi D. K., Agarwal D. C., Ogale S. B., Au-ZnO: a tunable localized surface plasmonic nanocomposite Applied Physics Letters 2008 92 4
24. Kaps S., Adelung R., Wolpert C., Preusse T., Claus M., Mishra Y. K., Elastic material with a pore space bridged at the particle level by nanobridges between particles. German Patent no. WO2011116751, PCT/DE2011/000282, 2011
25. Haraguchi K., Hiruma K., Katsuyama T., Tominaga K., Shirai M., Shimada T., Self-organized fabrication of planar GaAs nanowhisker arrays Applied Physics Letters 1996 69 3 386 387 (Pubitemid 126635991)
26. Islam M. S., Epitaxially integrated semiconductor nanowires for nanoscale electronics, photonics and NEMS Proceedings of the 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS '07) October 2007 707 708
27. Park W. I., Lee C. H., Chae J. H., Lee D. H., Yi G. C., Ultrafine ZnO nanowire electronic device arrays fabricated by selective metal-organic chemical vapor deposition Small 2009 5 2 181 184
28. Favier F., Walter E. C., Zach M. P., Benter T., Penner R. M., Hydrogen sensors and switches from electrodeposited palladium mesowire arrays Science 2001 293 5538 2227 2231 (Pubitemid 32900226)
29. Jebril S., Elbahri M., Titazu G., Subannajui K., Essa S., Niebelschtz F., Rhlig C. C., Cimalla V., Ambacher O., Schmidt B., Kabiraj D., Avasti D., Adelung R., Integration of thin-film-fracture-based nanowires into microchip fabrication Small 2008 4 12 2214 2221
30. Chu S. Y., Water W., Liaw J. T., Influence of postdeposition annealing on the properties of ZnO films prepared by RF magnetron sputtering Journal of the European Ceramic Society 2003 23 10 1593 1598 (Pubitemid 36386653)
31. Gedamu D., Jebril S., Schuchardt A., Elbahri M., Wille S., Kumar Mishra Y., Adelung R., Examples for the integration of self-organized nanowires for functional devices by a fracture approach Physica Status Solidi B 2010 247 10 2571 2580
32. Soci C., Zhang A., Xiang B., Dayeh S. A., Aplin D. P. R., Park J., Bao X. Y., Lo Y. H., Wang D., ZnO nanowire UV photodetectors with high internal gain Nano Letters 2007 7 4 1003 1009 (Pubitemid 46717749)
33. Pearton S. J., Ren F., Wang Y. L., Chu B. H., Chen K. H., Chang C. Y., Lim W., Lin J., Norton D. P., Recent advances in wide bandgap semiconductor biological and gas sensors Progress in Materials Science 2010 55 1 1 59
34. Baik J. M., Kim M. H., Larson C., Chen X., Guo S., Wodtke A. M., Moskovits M., High-yield TiO 2 nanowire synthesis and single nanowire field-effect transistor fabrication Applied Physics Letters 2008 92 24