SCOPUS 정보 검색 플랫폼

Volumn 4, Issue 12, 2008, Pages 2214-2221

Integration of thin-film-fracture-based nanowires into microchip fabrication

(13) Jebril, Seid a Elbahri, Mady a Titazu, Getachew a Subannajui, Kittitat a Essa, Samia a Niebelschütz, Florentina b Röhlig, Claus Christian c Cimalla, Volker c Ambacher, Oliver c Schmidt, Bernd d Kabiraj, Debdulal e Avasti, Devesh e Adelung, Rainer a

a UNIVERSITY OF KIEL (Germany)

b ILMENAU UNIVERSITY OF TECHNOLOGY (Germany)

c FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF (Germany)

d INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

e INTER UNIVERSITY ACCELERATOR CENTRE (India)

Author keywords

Gas detection; Microchip fabrication; Nanowires; Thin film fractures

Indexed keywords

ELECTRIC WIRE; FABRICATION; FRACTURE; HYDROGEN; NANOWIRES; PALLADIUM; SILICON; THIN FILM DEVICES;

DEVICE FABRICATIONS; DIFFERENT GEOMETRIES; FABRICATION PROCESSES; FABRICATION TECHNIQUES; FAULT-TOLERANT; FILM FRACTURES; FRACTURE PATTERNS; GAS DETECTION; HYDROGEN SENSORS; MICRO CONTACTS; MICRO-CHIPS; MICROCHIP FABRICATION; MICROCHIP FABRICATIONS; OXIDATION BEHAVIORS; SCIENTIFIC STUDIES; SILICON MICROCHIPS; STANDARD PHOTOLITHOGRAPHIES; THIN-FILM FRACTURES;

INTEGRATED CIRCUITS;

GOLD; METAL NANOPARTICLE; NANOWIRE; NICKEL; PALLADIUM; TITANIUM;

ARTICLE; CHEMISTRY; MICROARRAY ANALYSIS; OXIDATION REDUCTION REACTION; PARTICLE SIZE; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; ULTRASTRUCTURE;

GOLD; METAL NANOPARTICLES; MICROARRAY ANALYSIS; MICROSCOPY, ELECTRON, SCANNING; MICROSCOPY, ELECTRON, TRANSMISSION; NANOWIRES; NICKEL; OXIDATION-REDUCTION; PALLADIUM; PARTICLE SIZE; TITANIUM;

EID: 57349113976 PISSN: 16136810 EISSN: 16136829 Source Type: Journal
DOI: 10.1002/smll.200800228 Document Type: Article

Times cited : (28)

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